Chemical Synthesis of Electronic Gas Disilane: Current Status and Challenges from Mechanism to Industrial Synthesis

Disilane is a gaseous source of silicon widely used in solar photovoltaics and integrated circuit industries. In recent years, the development of efficient disilane synthesis processes has become increasingly urgent with the rapid development and growing demands of related industries. This review provides a comprehensive overview of different disilane synthesis methods and investigates silane decomposition mechanisms in the synthesis of higher-order silanes. The reaction kinetics of disilane and silane are also summarized to provide insights into the physical and chemical mechanisms for the synthesis of disilane from silane. Finally, the present challenges for the realization of industrial disilane synthesis from silane are discussed. This review would provide insights for the development of green, safe, and efficient disilane synthesis processes.