基于oxalis启发的激光诱导石墨烯压力传感器仿生微拼图结构的两级联锁

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Wentao Wang;Ziqiang Chen;Zeping Deng;Jiyuan Sun;Yixiong Yan
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引用次数: 0

摘要

在宽响应范围内实现高灵敏度是压力传感器面临的主要挑战。受天然草叶独特几何形状的启发,我们提出了一种新的方法,包括预蚀刻、生长和转移过程,以制造具有两阶段(例如微拼图、微孔)结构的激光诱导石墨烯(LIG)。实验结果表明,由于两级结构的压阻协同效应,草酸启发压力传感器具有平衡的灵敏度和响应范围(在0.5-5 kPa的线性范围内灵敏度为15.8 kPa-1)。外部微拼图结构之间的机械联锁引起了巨大的阻力变化,而内部自适应形状的微孔结构在动态变形中起缓冲作用,实现了大工作范围内的可逆回弹性。结合自主研发的一体式无线传输系统,进一步组装以草藻为灵感的压力传感器,监测各种健康参数,如微小的脉搏、心跳、声音等,在未来的可穿戴电子产品中显示出巨大的前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Oxalis-Inspired, Two-Stage Interlocking of Bionic Micro-Jigsaw Structure in Laser-Induced Graphene-Based Pressure Sensor
Achieving high sensitivity over a wide response range is a major challenge for pressure sensors. Inspired by the unique geometry of natural oxalis leaves, we here propose a novel approach that includes preetching, growth, and transfer process to fabricate laser-induced graphene (LIG) with a two-stage (e.g., micro-jigsaw, micropore) structure. Experimentally, the oxalis-inspired pressure sensor exhibits a balanced sensitivity and response range (sensitivity of 15.8 kPa-1 in a linearity range of 0.5–5 kPa), due to the piezoresistive synergistic effects of two-stage structures. The mechanical interlocking between outer micro-jigsaw structures initiates huge resistance changes, whereas the inner shape-adaptive micropore structure plays a buffer role in the dynamic deformation, enabling reversible resilience over a wide working range. In combination with a self-developed all-in-one wireless transmission system, the oxalis-inspired pressure sensor is further assembled to monitor various health parameters such as tiny pulse, heartbeat, and voice, revealing a huge prospect in future wearable electronics.
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来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
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