平面全向磁阻抗微螺旋型传感器

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2024-10-31 DOI:10.1109/JSEN.2024.3486315

H. A. Tam;N. V. Tuan;N. T. Ngoc;V. N. Thuc;L. V. Lich;N. T. P. Thao;D. T. Hien;B. T. Sang;C. G. Kim;V. D. Lam;N. H. Duc;D. T. Huong Giang

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引用次数: 0

摘要

本文介绍了一种新型的平面磁阻抗微传感器。采用激光烧蚀和湿法刻蚀技术，在20- $ $\ \mu $ m厚的非晶FeSiC带上制备了各种螺旋型（${N} =4$、5 $、6 $和7 ${N} =4$、5 $、6 $和7 ${N} =4$、5 $、6 $和7 ${N} =4$、5 $、6 $和7 ${N} =4$、5 $、6 $和7 $）和线形（单线（SL）和弯曲（MD）型）传感器。这些设计后来被系统地研究以评估其性能特征。螺旋式传感器显示出全方位的磁阻抗响应，显著降低甚至消除了传统线形传感器中典型的磁各向异性。值得注意的是，螺旋传感器的总体相对MI值约为120%，与传统md型传感器的150%相当。此外，螺旋传感器的谐振频率在1 GHz以下显著低于MD传感器的4 GHz，并通过LCR谐振电路得到充分解释。模拟得到的磁畴结构以及磁矩的横向分量贡献为全面理解各向同性响应机制提供了依据。本研究为生物医学全向平面传感器的设计开辟了一条新途径。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Planar Omnidirectional Magnetoimpedance-Based Sensors With Microspiral Patterns

The present work introduces a novel magnetoimpedance (MI) planar microsensor. Various spiral-style (N-sided regular concentric polygons with

${N} =4$

, 5, 6, and 7) and line-style (single line (SL) and meander (MD) type) sensors were fabricated from 20-

$\mu $

m-thick amorphous FeSiC ribbons by using laser ablation and wet etching techniques. These designs were later systematically investigated to evaluate their performance characteristics. The spiral-style sensors show an omnidirectional MI response with significant reduction or even elimination of the magnetic anisotropy typically observed in conventional line-style ones. Significantly, the overall relative MI value of the spiral sensors is approximately 120%, which is comparable to 150% observed in conventional MD-type sensors. In addition, the resonant frequencies of spiral sensors dramatically decrease below 1 GHz in comparison to that of 4 GHz in the MD one and are fully explained through the LCR resonance circuits. The magnetic domain structure as well as the transverse component contribution of magnetic moments obtained from simulations provide a comprehensive understanding of isotropic response mechanism. This study paves a new path in designing omnidirectional planar sensor devices for biomedical applications.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice