Coupled nonlinear modeling of a novel high-sensitivity MEMS capacitive accelerometer enhanced by tilted pillars

The investigation of novel models, methodologies and materials with the objective of enhancing the sensitivity of capacitive micro-accelerometers represents a topic of enduring interest to researchers. This paper presents a novel model enhanced by a microstructured gap comprising tilted polydimethylsiloxane pillars. A complex mathematical model has been developed to describe the system's behavior, comprising a set of coupled nonlinear equations. The results reveal the accelerometer's response to both sinusoidal and shock inputs. It has been demonstrated that the novel model can enhance sensitivity by more than fourfold. A crucial aspect of the investigation is a comparative evaluation of scenarios with and without micro-pillars, as well as variations in micro-pillars' number and tilt angles. These findings yield valuable insights into the effects of these design parameters on the sensor's performance, laying the groundwork for optimizing the design to achieve heightened sensitivity and reduced actuation voltage.