名义（001）取向Si （Adv.）材料外延型GaP的光机械空腔。抛光工艺。24/2024)

IF 6.4 3区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Advanced Materials Technologies Pub Date : 2024-12-16 DOI:10.1002/admt.202470112

Paula Mouriño, Laura Mercadé, Miguel Sinusía Lozano, Raquel Resta, Amadeu Griol, Karim Ben Saddik, Enrique Barrigón, Sergio Fernández-Garrido, Basilio Javier García, Alejandro Martínez, Víctor J. Gómez

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引用次数: 0

摘要

Cavity Optomechanics在编号为 2400525 的文章中，Víctor J. Gómez 及其合作者介绍了采用新颖的两步干蚀刻工艺在精确 (001)-Si 上外延生长的 GaP 光机械的制造过程。这为在硅(001)光子晶片上直接集成基于 GaP 的光子器件提供了一种简单而低成本的方法。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Optomechanical Cavities Based on Epitaxial GaP on Nominally (001)-Oriented Si (Adv. Mater. Technol. 24/2024)

查看原文本刊更多论文

Optomechanical Cavities Based on Epitaxial GaP on Nominally (001)-Oriented Si (Adv. Mater. Technol. 24/2024)

Cavity Optomechanics

In article number 2400525, Víctor J. Gómez and co-workers present the process of fabrication of a GaP optomechanical epitaxially grown on exact (001)-Si following a novel two-step dry-etching process. This suggests a simple and lowcost way to build GaP-based photonic devices directly integrated on Si(001) photonic wafers.

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来源期刊

Advanced Materials Technologies Materials Science-General Materials Science

CiteScore

10.20

自引率

4.40%

发文量

566

期刊介绍： Advanced Materials Technologies Advanced Materials Technologies is the new home for all technology-related materials applications research, with particular focus on advanced device design, fabrication and integration, as well as new technologies based on novel materials. It bridges the gap between fundamental laboratory research and industry.