Toward nanofabrication of SERS substrates with two-photon polymerization.

Surface-enhanced Raman spectroscopy (SERS) has shown its ability to characterize biological substances down to a single-molecule level without a specific biorecognition mechanism. Various nanofabrication technologies enable SERS substrate prototyping and mass manufacturing. This study reports a complete cycle of design, fabrication, prototyping, and metrology of SERS substrates based on two-photon polymerization (2PP). Highly controllable direct laser writing allows the fabrication of individual nanopillars with up to an aspect ratio of 4. The developed SERS substrates show up to 10⁶ Raman signal enhancement, comparable to commercial substrates. Moreover, the rapid prototyping of the 2PP-printed SERS substrates takes from a minute to less than 2 hours, depending upon the nano-printing approach and aspect ratio requirements. The process is well-controlled and reproducible for achieving a uniform distribution of nanostructure arrays, allowing the SERS substrates to be used for a broad range of applications and the characterization of different molecules.