评估氦离子轰击固定溅射过程中钨和钽碳化物改性层的成分组成和厚度

IF 0.5 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2024-12-18 DOI:10.1134/S1027451024700885

V. V. Manukhin

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摘要

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Evaluation of the Component Composition and Thickness of the Modified Layer of Tungsten and Tantalum Carbides during Stationary Sputtering by Helium Ions Bombardment

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Evaluation of the Component Composition and Thickness of the Modified Layer of Tungsten and Tantalum Carbides during Stationary Sputtering by Helium Ions Bombardment

A method is proposed for calculating the component composition and thickness of a layer of two-component targets changed as a result of prolonged (stoichiometric) sputtering when irradiated with light ions. The method is based on a previously tested model of sputtering inhomogeneous two–component materials with light ions. In the case of stationary sputtering of tungsten and tantalum carbides with helium ions, the results of calculations of the component composition and thickness of the modified layer are presented in comparison with experimental data.

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.