{"title":"Enhanced Barrier and Optical Properties of Inorganic Nano-Multilayers on PEN Substrate Through Hybrid Deposition.","authors":"Xiaojie Sun, Lanlan Chen, Wei Feng","doi":"10.3390/ma17236007","DOIUrl":null,"url":null,"abstract":"<p><p>In this study, an inorganic multilayer barrier film was fabricated on the polyethylene naphthalate (PEN) substrate, which was composed of a SiO<sub>2</sub> layer prepared by inductively coupled plasma chemical vapor deposition (ICP-CVD) and a Al<sub>2</sub>O<sub>3</sub>/ZnO nanolaminate produced by plasma-enhanced atomic layer deposition (PEALD). The multilayer composite film with a structure of 50 nm SiO<sub>2</sub> + (4.5 nm Al<sub>2</sub>O<sub>3</sub>/6 nm ZnO) × 4 has excellent optical transmittance (88.1%) and extremely low water vapor permeability (3.3 × 10<sup>-5</sup> g/m<sup>2</sup>/day, 38 °C, 90% RH), indicating the cooperation of the two advanced film growth methods. The results suggest that the defects of the SiO<sub>2</sub> layer prepared by ICP-CVD were effectively repaired by the PEALD layer, which has excellent defect coverage. And Al<sub>2</sub>O<sub>3</sub>/ZnO nanolaminates have advantages over single-layer Al<sub>2</sub>O<sub>3</sub> due to their complex diffusion pathways. The multilayer barrier film offers potential for encapsulating organic electronic devices that require a longer lifespan.</p>","PeriodicalId":18281,"journal":{"name":"Materials","volume":"17 23","pages":""},"PeriodicalIF":3.1000,"publicationDate":"2024-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11643419/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3390/ma17236007","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
Enhanced Barrier and Optical Properties of Inorganic Nano-Multilayers on PEN Substrate Through Hybrid Deposition.
In this study, an inorganic multilayer barrier film was fabricated on the polyethylene naphthalate (PEN) substrate, which was composed of a SiO2 layer prepared by inductively coupled plasma chemical vapor deposition (ICP-CVD) and a Al2O3/ZnO nanolaminate produced by plasma-enhanced atomic layer deposition (PEALD). The multilayer composite film with a structure of 50 nm SiO2 + (4.5 nm Al2O3/6 nm ZnO) × 4 has excellent optical transmittance (88.1%) and extremely low water vapor permeability (3.3 × 10-5 g/m2/day, 38 °C, 90% RH), indicating the cooperation of the two advanced film growth methods. The results suggest that the defects of the SiO2 layer prepared by ICP-CVD were effectively repaired by the PEALD layer, which has excellent defect coverage. And Al2O3/ZnO nanolaminates have advantages over single-layer Al2O3 due to their complex diffusion pathways. The multilayer barrier film offers potential for encapsulating organic electronic devices that require a longer lifespan.
期刊介绍：
Materials (ISSN 1996-1944) is an open access journal of related scientific research and technology development. It publishes reviews, regular research papers (articles) and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. Therefore, there is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Materials provides a forum for publishing papers which advance the in-depth understanding of the relationship between the structure, the properties or the functions of all kinds of materials. Chemical syntheses, chemical structures and mechanical, chemical, electronic, magnetic and optical properties and various applications will be considered.
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