[GeOx](z)[SiO2]（1-z）基MIS结构中的电荷输运机制

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2024-12-09 DOI:10.1063/5.0240239

I. D. Yushkov, A. A. Gismatulin, I. P. Prosvirin, G. N. Kamaev, D. V. Marin, M. Vergnat, V. A. Volodin

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引用次数: 0

摘要

研究了氧化锗和氧化硅粉末真空共蒸发制备的[GeOx](z)[SiO2]（1-z）薄膜（0.25≤z≤1）沉积在p+型硅衬底上的金属-绝缘体-半导体（MIS）结构的导电机理。采用磁控管法沉积的氧化铟锡作为顶电极。根据红外光谱，在薄膜中检测到Ge-O， Si-O和Ge-O - si键，而在拉曼光谱中没有发现与锗团簇存在相关的特征。在不同温度下测量了电流-电压特性（I-V曲线），并通过应用MIS结构中最常见的八种电荷输运模型进行了分析。研究发现，空间电荷限制电流模型能最准确地逼近实验的I-V曲线，并在此模型内确定电荷陷阱的参数。

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Charge transport mechanism in [GeOx](z)[SiO2](1-z) based MIS structures

The mechanisms of conductivity in metal–insulator–semiconductor (MIS) structures based on [GeOx](z)[SiO2](1-z) films (0.25 ≤ z ≤ 1) fabricated by co-evaporation of germanium oxide and silicon oxide powders in vacuum and deposition on a p+-type silicon substrate are studied. Indium tin oxide deposited by magnetron method is used as the top electrode. According to IR spectroscopy, Ge–O, Si–O, and Ge–O–Si bonds are detected in the films, while no features related to the presence of germanium clusters are found in the Raman spectra. The current–voltage characteristics (I–V curves) are measured at different temperatures and analyzed by applying the eight most common models of charge transport in MIS structures. It is found that the experimental I–V curves are most accurately approximated in the space charge limited current model, and the parameters of the charge traps are determined within this model.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.