优化坩埚几何形状,利用物理蒸汽输运法提高AlN晶体质量

IF 5.2 3区 材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY
Wenhao Cao, Shouzhi Wang, Ruixian Yu, Qiubo Li, Guodong Wang, Yajun Zhu, Yuzhu Wu, Lingshuang Lv, Jingliang Liu, Xiangang Xu, Lei Zhang
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引用次数: 0

摘要

在传统的物理气相输运AlN晶体生长的坩埚结构中,由于Al蒸气的分子输运路径长,以及偏转板的存在破坏了气体的流动,使得Al蒸气容易在生长区域形成多晶。结果是晶体内应力增大,增大了生长大尺寸晶体的难度。在此基础上,通过有限元模拟,设计了一种新型坩埚结构。该坩埚不仅优化了气体输运,而且增加了AlN晶体表面的径向梯度,使中心区域的生长速率增强更加明显。偏转板与晶体之间的热应力也减小了。利用该结构成功生长出了高质量的AlN晶体,FWHM为79弧秒,验证了有限元模拟AlN晶体生长的准确性。我们的工作对高质量AlN晶体的生长具有重要的指导意义。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimizing crucible geometry to improve the quality of AlN crystals by the physical vapor transport method

In the conventional crucible structure for AlN crystal growth by physical vapor transport, owing to the long molecular transport path of Al vapor and the disruption of the gas flow by the presence of a deflector, the Al vapor easily forms polycrystals in the growth domain. The result is increased internal stress in the crystals and increased difficulty in growing large-sized crystals. On this basis, with the help of finite element simulations, a novel crucible structure is designed. This crucible not only optimizes the gas transport but also increases the radial gradient of the AlN crystal surface, making the enhanced growth rate in the central region more obvious. The thermal stresses between the deflector and the crystal are also reduced. High-quality AlN crystals with an FWHM of 79 arcsec were successfully grown with this structure, verifying the accuracy of finite element simulation of the growth of AlN crystals. Our work has important guiding significance for the growth of high-quality AlN crystals.

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来源期刊
Journal of Applied Crystallography
Journal of Applied Crystallography CHEMISTRY, MULTIDISCIPLINARYCRYSTALLOGRAPH-CRYSTALLOGRAPHY
CiteScore
7.80
自引率
3.30%
发文量
178
期刊介绍: Many research topics in condensed matter research, materials science and the life sciences make use of crystallographic methods to study crystalline and non-crystalline matter with neutrons, X-rays and electrons. Articles published in the Journal of Applied Crystallography focus on these methods and their use in identifying structural and diffusion-controlled phase transformations, structure-property relationships, structural changes of defects, interfaces and surfaces, etc. Developments of instrumentation and crystallographic apparatus, theory and interpretation, numerical analysis and other related subjects are also covered. The journal is the primary place where crystallographic computer program information is published.
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