{"title":"半导体电子显微镜中能量色散x射线光谱和图量化的最新进展","authors":"Thomas Walther","doi":"10.1002/appl.202300128","DOIUrl":null,"url":null,"abstract":"<p>This tutorial-style article describes recent improvements in the quantitative application of energy-dispersive X-ray spectroscopy and mapping in electron microscopes to semiconductors, with a focus on spatial resolution, sensitivity and accuracy obtainable in characterising the chemical composition of thin layers, quantum wells and quantum dots. Various approaches applicable in scanning electron microscopy of bulk and (scanning) transmission electron microscopy of thin film samples are outlined. Applications to semiconductor quantum well systems, mainly based on indium gallium arsenide and silicon germanium studied in the author's laboratory, are provided as examples.</p>","PeriodicalId":100109,"journal":{"name":"Applied Research","volume":"3 6","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/appl.202300128","citationCount":"0","resultStr":"{\"title\":\"Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors\",\"authors\":\"Thomas Walther\",\"doi\":\"10.1002/appl.202300128\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>This tutorial-style article describes recent improvements in the quantitative application of energy-dispersive X-ray spectroscopy and mapping in electron microscopes to semiconductors, with a focus on spatial resolution, sensitivity and accuracy obtainable in characterising the chemical composition of thin layers, quantum wells and quantum dots. Various approaches applicable in scanning electron microscopy of bulk and (scanning) transmission electron microscopy of thin film samples are outlined. Applications to semiconductor quantum well systems, mainly based on indium gallium arsenide and silicon germanium studied in the author's laboratory, are provided as examples.</p>\",\"PeriodicalId\":100109,\"journal\":{\"name\":\"Applied Research\",\"volume\":\"3 6\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-07-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://onlinelibrary.wiley.com/doi/epdf/10.1002/appl.202300128\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/appl.202300128\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Research","FirstCategoryId":"1085","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/appl.202300128","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors
This tutorial-style article describes recent improvements in the quantitative application of energy-dispersive X-ray spectroscopy and mapping in electron microscopes to semiconductors, with a focus on spatial resolution, sensitivity and accuracy obtainable in characterising the chemical composition of thin layers, quantum wells and quantum dots. Various approaches applicable in scanning electron microscopy of bulk and (scanning) transmission electron microscopy of thin film samples are outlined. Applications to semiconductor quantum well systems, mainly based on indium gallium arsenide and silicon germanium studied in the author's laboratory, are provided as examples.
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