用于仿生 MEMS 传感器的压电场效应晶体管 (Piezo-FET):文献综述

IF 4.9 3区 计算机科学 Q1 ENGINEERING, MULTIDISCIPLINARY
Chang Ge, Huawei Chen
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引用次数: 0

摘要

本文通过文献综述探讨了压电场效应晶体管(piezo-FET)作为仿生微机电系统(MEMS)的潜力。首先,本文介绍了压电场效应晶体管作为自然机械感受器的仿生对应物,重点介绍了其经典配置和工作原理。然后,本文总结了压电场效应晶体管作为压力、惯性和声学传感器的现有研究。本文回顾了材料选择、设计特点和关键性能指标,以展示压电晶体管相对于传统压电传感器的优势。在确定了这些现有研究的局限性之后,本文建议在压电晶体管中使用仿生压电耦合结构,以进一步增强这些人工机械感受器的传感能力。本文还对新提出的压电场效应晶体管结构的实验验证制造方法进行了综述,为这些仿生压电 MEMS 传感器指出了一个新颖、可行且有影响力的研究方向。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review

Piezoelectric Field Effect Transistors (Piezo-FETs) for Bionic MEMS Sensors: A Literature Review

This paper presents a literature review exploring the potential of piezoelectric field-effect transistors (piezo-FETs) as bionic microelectromechanical systems (MEMS). First, piezo-FETs are introduced as bionic counterparts to natural mechanoreceptors, highlighting their classic configuration and working principles. Then, this paper summarizes the existing research on piezo-FETs as sensors for pressure, inertial, and acoustic sensors. Material selections, design characteristics, and key performance metrics are reviewed to demonstrate the advantage of piezo-FETs over traditional piezoelectric sensors. After identifying the limitations in these existing studies, this paper proposes using bionic piezoelectric coupling structures in piezo-FETs to further enhance the sensing capabilities of these artificial mechanoreceptors. Experimentally validated manufacturing methods for the newly proposed piezo-FET structures are also reviewed, pointing out a novel, feasible, and impactful research direction on these bionic piezoelectric MEMS sensors.

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来源期刊
Journal of Bionic Engineering
Journal of Bionic Engineering 工程技术-材料科学:生物材料
CiteScore
7.10
自引率
10.00%
发文量
162
审稿时长
10.0 months
期刊介绍: The Journal of Bionic Engineering (JBE) is a peer-reviewed journal that publishes original research papers and reviews that apply the knowledge learned from nature and biological systems to solve concrete engineering problems. The topics that JBE covers include but are not limited to: Mechanisms, kinematical mechanics and control of animal locomotion, development of mobile robots with walking (running and crawling), swimming or flying abilities inspired by animal locomotion. Structures, morphologies, composition and physical properties of natural and biomaterials; fabrication of new materials mimicking the properties and functions of natural and biomaterials. Biomedical materials, artificial organs and tissue engineering for medical applications; rehabilitation equipment and devices. Development of bioinspired computation methods and artificial intelligence for engineering applications.
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