蒸发-等离子屏蔽的耦合效应及其对飞秒激光烧蚀的影响

IF 2.8 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Zhiqiang He, Donghan Yang, Mengya Zhang, Jibang Liao, Yi Liu, Ling Li
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引用次数: 0

摘要

采用双温模型研究了飞秒烧蚀金薄膜过程中的蒸发和等离子体屏蔽耦合效应。等离子体屏蔽效应的特征是等离子体膨胀动力学与电子源项的耦合。蒸发效应是通过液气界面跟踪方法实现的。模拟结果表明,由于电子被脉宽为 120 fs、能量密度为 5000 J/m2 的飞秒激光加热,反射率和吸收系数分别从 0.488 和 486 μm-1 降至 0.293 和 180 μm-1。由于金膜吸收了更多的能量,电子和声子温度急剧上升。当加热间隔为 10 ps 时,等离子体吸收了 30% 的激光能量。此外,在 2500-15000 J/m2 范围内,等离子体的屏蔽效应随着激光能量密度的增加而增强。通过控制脉冲间隔时间,可以减弱等离子体对激光照射金膜的影响。这有助于提高飞秒激光加工的精度和效率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Coupling effect of evaporation-plasma shielding and its influence on femtosecond laser ablation

The two-temperature model is employed to investigate the evaporation and plasma shielding coupling effect by femtosecond ablation during the ablation of gold films. The plasma shielding effect is characterized by coupling the plasma expansion dynamics with the electron source term. The evaporation effect is realized by the liquid–vapor interface tracking method. The simulation results show that the reflectivity and absorption coefficient decrease from 0.488 and 486 μm−1 to 0.293 and 180 μm−1, respectively, due to the electron heating by the femtosecond laser with 120 fs pulse width and 5000 J/m2 energy density. The electron and phonon temperatures increase sharply because the gold film absorbs more energy. While the heating interval is 10 ps, the plasma absorbs 30% laser energy. Moreover, the plasma shielding effect is enhanced with the increasing laser energy density in the 2500–15000 J/m2 range. The influence of plasma on laser-irradiated gold film can be weakened by controlling the pulse interval time. It is helpful to improve the accuracy and efficiency of femtosecond laser processing.

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来源期刊
Applied Physics A
Applied Physics A 工程技术-材料科学:综合
CiteScore
4.80
自引率
7.40%
发文量
964
审稿时长
38 days
期刊介绍: Applied Physics A publishes experimental and theoretical investigations in applied physics as regular articles, rapid communications, and invited papers. The distinguished 30-member Board of Editors reflects the interdisciplinary approach of the journal and ensures the highest quality of peer review.
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