Deng Pan, Gaoyuan Ren, Jingwei Zhang, Xiangyu Liu, Shudong Wang
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Core–Shell Structured Silica Nanoparticles as Abrasive for Tungsten Chemical Mechanical Planarization
Core–shell structured silica nanoparticles with different sizes were successfully prepared by the reaction between tetramethoxysilane (TMOS) and the SiO2 core under a mild condition. The obtained silica nanoparticles have a unique structure with tight cores and loose shells, which showed superior performance during tungsten (W) chemical mechanical planarization (CMP) process. The material removal rate (MRR) increased significantly from 763 to 1631 Å/min (with ~ 100 nm particles) while the surface roughness decreased from 1.802 to 1.252 nm. A series of characterization indicates that the superior performance of core–shell structured silica nanoparticles can be attributed to the formation of the irregular loose shell, increasing the mechanical friction during the W CMP process. Meanwhile, the loose shell structure can also contribute to the improvement of the wafer surface quality after CMP process. This work provides a new strategy for designing high-efficient abrasives for CMP process.
期刊介绍：
Tribology Letters is devoted to the development of the science of tribology and its applications, particularly focusing on publishing high-quality papers at the forefront of tribological science and that address the fundamentals of friction, lubrication, wear, or adhesion. The journal facilitates communication and exchange of seminal ideas among thousands of practitioners who are engaged worldwide in the pursuit of tribology-based science and technology.
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