利用呼气退火提高非易失性存储器的性能:铪基铁电低温结晶的新方法

IF 8.2 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Yunseong Lee , Un Jeong Kim , Kihong Kim , Dong-Jin Yun , Duk-hyun Choe , Sijung Yoo , Hyun Jae Lee , Seung-Geol Nam , Sanghyun Jo , Yoonsang Park , Donghoon Kim , Dongmin Kim , Haeryong Kim , Keunwook Shin , Sahn Nahm , Jinseong Heo
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引用次数: 0

摘要

在本研究中,我们提出了一种与 CMOS 兼容的呼气退火(EA)方法,该方法可显著降低掺杂 Zr 的铪基铁电材料(HZO)的退火温度。与传统的快速热退火(RTA)工艺相比,我们的 EA 工艺降低了所有厚度范围(5-10 nm)内 HZO 薄膜的结晶温度(Tcryst)。特别是厚度为 5 纳米的 HZO 薄膜,它是未来三维半导体器件的理想选择,其 Tcryst 从 500 °C 降低到 250 °C,降幅达 50%。X 射线光电子能谱(XPS)分析表明,EA 方法降低了残碳和氧空位浓度。高分辨率透射电子显微镜(HRTEM)证实,HZO 与电极之间的界面混合显著减少。钼(Mo)电极/HZO/Mo 电极结构制成的电容器在 250 ℃ 下使用 EA 退火,在 3 MV cm-1 时的漏电流降低了 2 个数量级,同时还具有稳健的铁电特性(2Pr 和 2Ec 值分别为 36.7 μC cm-2 和 2.38 MV cm-1)。将我们的方法应用于晶圆规模的铁电场效应晶体管(FeFET),使其内存窗口增加了 33%。与 CMOS 兼容的 EA 方法能有效地在晶圆上生产铁电场效应晶体管,非常适合制造下一代基于铪的铁电非挥发性存储器。EA 工艺对工业友好,热损伤极小,因此在开发未来半导体器件方面大有可为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Boosting non-volatile memory performance with exhalative annealing: A novel approach to low-temperature crystallization of hafnia based ferroelectric
In this study, we propose a CMOS-compatible exhalative annealing (EA) method that can significantly reduce the annealing temperature of Zr-doped hafnia-based ferroelectrics (HZO). Compared to the conventional rapid thermal annealing (RTA) process, our EA process reduces the crystallization temperature (Tcryst) of HZO films across all thickness ranges (5–10 nm). In particular, a 5 nm-thick HZO film, which is ideal for future 3D semiconductor devices, exhibited a 50 % reduction in Tcryst from 500 °C to 250 °C. X-ray photoelectron spectroscopy (XPS) analysis reveals that the EA method reduces both residual carbon and oxygen vacancy concentrations. High-resolution transmission electron microscopy (HRTEM) confirmed a significant reduction in interfacial mixing between HZO and the electrodes. Capacitors made of Molybdenum (Mo) electrode/HZO/Mo electrode structure annealed using EA at 250 °C exhibited 2 orders of magnitude reduced leakage current at 3 MV cm−1, along with robust ferroelectric properties (2Pr and 2Ec values of 36.7 μC cm−2 and 2.38 MV cm−1, respectively). Implementing our method to ferroelectric field effect transistors (FeFETs) on a wafer scale resulted in a 33 % increase in their memory window. The CMOS-compatible EA method is effective for producing ferroelectric field-effect transistors on a wafer scale and is well suited for the fabrication of next-generation hafnia-based ferroelectric nonvolatile memory. EA holds great promise for developing future semiconductor devices due to its industry-friendly process and minimal thermal damage.
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来源期刊
CiteScore
11.30
自引率
3.90%
发文量
130
审稿时长
31 days
期刊介绍: Materials Today Nano is a multidisciplinary journal dedicated to nanoscience and nanotechnology. The journal aims to showcase the latest advances in nanoscience and provide a platform for discussing new concepts and applications. With rigorous peer review, rapid decisions, and high visibility, Materials Today Nano offers authors the opportunity to publish comprehensive articles, short communications, and reviews on a wide range of topics in nanoscience. The editors welcome comprehensive articles, short communications and reviews on topics including but not limited to: Nanoscale synthesis and assembly Nanoscale characterization Nanoscale fabrication Nanoelectronics and molecular electronics Nanomedicine Nanomechanics Nanosensors Nanophotonics Nanocomposites
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