带有新型双爪转子的双爪真空泵的建模和工作过程机理

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2024-11-19 DOI:10.1016/j.vacuum.2024.113844

Min Wei, Haibin Liu, Lezhi Ye, Yanfeng Wei, Yue Chang

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引用次数: 0

摘要

双爪转子能显著提高爪式真空泵的抽气速度。为了开发综合性能更高的新型爪式转子，本研究提出了一种由椭圆弧、线段、圆弧及其共轭曲线组成的新型双啮合双爪转子。建立了双爪转子的几何模型，并推导了轮廓方程。分析了所提出的双爪转子的独立几何参数对其性能的影响，然后设计出了采用这些新型转子的相应双爪真空泵。同时，对其工作过程进行了研究和数值模拟。结果表明，所提出的双爪转子具有几个显著的优点，包括抽气速度更高、轮廓啮合特性更好以及动平衡性能更强。双爪真空泵的工作过程包括 5 个过程：吸气过程、等距输送过程、压缩过程、排气过程和混合过程。本研究的内容将为双爪真空泵的开发提供理论依据，并促进其应用。

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Modelling and working process mechanism of a double-claw vacuum pump with novel double-claw rotors

Double-claw rotors can significantly increase the pumping speed of the claw vacuum pump. In order to develop new claw rotors with higher comprehensive performance, in this study, a novel type of two intermeshing double-claw rotors consisting of the elliptical arc, line segment, circular arc and their conjugate curves was proposed. A geometric model of the proposed double-claw rotor was established, and profile equations were also derived. The effects of its independent geometric parameters of the proposed double-claw rotors on the performance were analyzed, and then a corresponding double-claw vacuum pump with these novel rotors was designed. Meanwhile, its the working process was studied and numerically simulated. Results indicate that the proposed double-claw rotor offers several significant advantages, including a higher pumping speed, improved profile meshing characteristics, and enhanced dynamic balance performance. The working process of the double-claw vacuum pump includes 5 processes: suction process, isometric delivery process, compression process, discharge process and mixing process. The contents of this study will provide theoretical basis for the development of the double-claw vacuum pump and promote its application.

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.