Meng Wang , Wei Zhang , Bo Xin , Jie Gao , Liqun Shi , Hongliang Zhang
{"title":"测量锆的质子弹性散射截面和厚 ZrDx 薄膜中的氘分布","authors":"Meng Wang , Wei Zhang , Bo Xin , Jie Gao , Liqun Shi , Hongliang Zhang","doi":"10.1016/j.nimb.2024.165576","DOIUrl":null,"url":null,"abstract":"<div><div>To precisely quantify the deuterium (D) concentration at significant depths and enhance the understanding of D distribution in zirconium (Zr) films, the proton elastic scattering cross-section of Zr was measured on an Au/Zr/Ti thin film. The measurement was conducted at laboratory angles of 165° and 170° over an energy range of 1.5–5.0 MeV. Non-Rutherford scattering was observed at proton energies exceeding 4.43 MeV. By combining proton backscattering (PBS) and nuclear reaction analysis (NRA) at different energies, a highly precise quantification of D concentrations within deuterated zirconium film, with depth resolution below 500 nm, was achieved. Additionally, we established initial assessments of Zr, Mo, and D atom concentrations in the ZrD<sub>x</sub>/Mo film, laying the groundwork for future studies.</div></div>","PeriodicalId":19380,"journal":{"name":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","volume":"559 ","pages":"Article 165576"},"PeriodicalIF":1.4000,"publicationDate":"2024-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measurement of proton elastic scattering cross-section of Zr and deuterium distribution in thick ZrDx films\",\"authors\":\"Meng Wang , Wei Zhang , Bo Xin , Jie Gao , Liqun Shi , Hongliang Zhang\",\"doi\":\"10.1016/j.nimb.2024.165576\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>To precisely quantify the deuterium (D) concentration at significant depths and enhance the understanding of D distribution in zirconium (Zr) films, the proton elastic scattering cross-section of Zr was measured on an Au/Zr/Ti thin film. The measurement was conducted at laboratory angles of 165° and 170° over an energy range of 1.5–5.0 MeV. Non-Rutherford scattering was observed at proton energies exceeding 4.43 MeV. By combining proton backscattering (PBS) and nuclear reaction analysis (NRA) at different energies, a highly precise quantification of D concentrations within deuterated zirconium film, with depth resolution below 500 nm, was achieved. Additionally, we established initial assessments of Zr, Mo, and D atom concentrations in the ZrD<sub>x</sub>/Mo film, laying the groundwork for future studies.</div></div>\",\"PeriodicalId\":19380,\"journal\":{\"name\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"volume\":\"559 \",\"pages\":\"Article 165576\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2024-11-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0168583X2400346X\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0168583X2400346X","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Measurement of proton elastic scattering cross-section of Zr and deuterium distribution in thick ZrDx films
To precisely quantify the deuterium (D) concentration at significant depths and enhance the understanding of D distribution in zirconium (Zr) films, the proton elastic scattering cross-section of Zr was measured on an Au/Zr/Ti thin film. The measurement was conducted at laboratory angles of 165° and 170° over an energy range of 1.5–5.0 MeV. Non-Rutherford scattering was observed at proton energies exceeding 4.43 MeV. By combining proton backscattering (PBS) and nuclear reaction analysis (NRA) at different energies, a highly precise quantification of D concentrations within deuterated zirconium film, with depth resolution below 500 nm, was achieved. Additionally, we established initial assessments of Zr, Mo, and D atom concentrations in the ZrDx/Mo film, laying the groundwork for future studies.
期刊介绍:
Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.