晶圆级双层硅绝缘体硅双盘光机械谐振器。

IF 3.2 2区 物理与天体物理 Q2 OPTICS
Optics express Pub Date : 2024-11-04 DOI:10.1364/OE.538819
Amy Navarathna, Benjamin J Carey, James S Bennett, Soroush Khademi, Warwick P Bowen
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引用次数: 0

摘要

悄声画廊模式(WGM)光机械谐振器是一种很有前途的技术,可在纳米尺度上同时控制和测量光学和机械自由度。它们具有广泛的应用潜力,例如传感器和量子传感器。双盘 WGM 谐振器在其圆周上共定位了强相互作用的机械和光学模式,因其高度的光机耦合而特别具有吸引力。硅双盘 WGM 谐振器的大规模集成制造以前从未展示过。在这项工作中,我们提出了一种制造双层硅-绝缘体晶片的工艺,然后利用这种工艺制造出具有片上光学耦合的功能性光机械双硅盘谐振器。实验观测到的集成器件的光学品质因数为 105,单光子光机械耦合频率约为 15 kHz。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Silicon double-disk optomechanical resonators from wafer-scale double-layered silicon-on-insulator.

Whispering Gallery Mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work, we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present experimentally observed optical quality factors of the order of 105 and a single-photon optomechanical coupling of approximately 15 kHz.

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来源期刊
Optics express
Optics express 物理-光学
CiteScore
6.60
自引率
15.80%
发文量
5182
审稿时长
2.1 months
期刊介绍: Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.
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