在硅晶片上摩擦增强形成铜微线。

IF 2.9 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Chenxu Liu, Yang Song, Zhimin Chai, Hongbo Zeng, Yu Tian, Yonggang Meng
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引用次数: 0

摘要

摩擦学打印正在成为一种前景广阔的微/纳米制造技术。一项重大挑战是提高效率,尽量减少数千次滑动循环以创建纳米或微结构的需要(ACS Appl. Mater. Inter. 2018;10:40335-47,Nanotechnology 2019;30:95302)。本研究提出了一种在含有铜纳米颗粒的乙醇基润滑剂蒸发过程中通过摩擦法在硅晶片上形成铜微线的快速方法。制备时间受润滑剂添加量的影响,在最佳条件下,生产厚度为 200 纳米的铜微线的时间可缩短至 300 秒(600 次滑动循环)。关键方面包括乙醇对摩擦对的润滑作用以及乙醇蒸发在铜微线生长过程中的作用。微丝的成功形成需要在微丝增粗和消除磨损之间取得谨慎的平衡。由此产生的铜微线具有机械和电气特性,适合用作微型导体。这项工作为在硅表面和其他曲面上制造导电微结构提供了一种新方法,为微电子学和传感器技术提供了潜在应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Friction-enhanced formation of Cu microwire on Si wafer.

Tribological printing is emerging as a promising technique for micro/nano manufacturing. A significant challenge is enhancing efficiency and minimizing the need for thousands of sliding cycles to create nano- or microstructures (ACS Appl. Mater. Inter. 2018;10:40335-47, Nanotechnology 2019;30:95302). This study presents a rapid approach for forming Cu microwires on Si wafers through a friction method during the evaporation of an ethanol-based lubricant containing Cu nanoparticles. The preparation time is influenced by the volume of the lubricant added, with optimal conditions reducing the time to 300 seconds (600 sliding cycles) for producing Cu microwires with a thickness of 200 nm. Key aspects include the lubricating effect of ethanol on the friction pairs and the role of ethanol evaporation in the growth of Cu microwires. Successful formation requires a careful balance between microwire thickening and wear removal. The resulting Cu microwires demonstrate mechanical and electrical properties that make them suitable as micro conductors. This work provides a novel approach for fabricating conductive microstructures on Si surfaces and other curved surfaces, offering potential applications in microelectronics and sensor technologies.

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来源期刊
Nanotechnology
Nanotechnology 工程技术-材料科学:综合
CiteScore
7.10
自引率
5.70%
发文量
820
审稿时长
2.5 months
期刊介绍: The journal aims to publish papers at the forefront of nanoscale science and technology and especially those of an interdisciplinary nature. Here, nanotechnology is taken to include the ability to individually address, control, and modify structures, materials and devices with nanometre precision, and the synthesis of such structures into systems of micro- and macroscopic dimensions such as MEMS based devices. It encompasses the understanding of the fundamental physics, chemistry, biology and technology of nanometre-scale objects and how such objects can be used in the areas of computation, sensors, nanostructured materials and nano-biotechnology.
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