Tiantian Luo, Dezhong Cao*, Feifei Wang, He Wang, Xiaodong Yan, Wangxin Gao, Mengqi Tian, Yuxuan Diwu, Zhengquan Guo, Qinglong Fang, Ningning Feng, Li Ma, Sen Wang, Dingze Lu, Song Feng, Xiaohua Ma and Yue Hao,
{"title":"带有纳米多孔 GaN 分布布拉格反射镜的大面积纳米多孔 InGaN 基发光二极管的形成及其明显增强的光学特性","authors":"Tiantian Luo, Dezhong Cao*, Feifei Wang, He Wang, Xiaodong Yan, Wangxin Gao, Mengqi Tian, Yuxuan Diwu, Zhengquan Guo, Qinglong Fang, Ningning Feng, Li Ma, Sen Wang, Dingze Lu, Song Feng, Xiaohua Ma and Yue Hao, ","doi":"10.1021/acs.cgd.4c0105110.1021/acs.cgd.4c01051","DOIUrl":null,"url":null,"abstract":"<p >Compared with nitric acid solution, oxalic acid solution has the advantages of safety, environmental protection, and a controllable etching rate. Large-area (20.3 cm<sup>2</sup>) nanoporous InGaN-based LEDs with nanoporous GaN distributed Bragg mirrors (NP LEDs) are prepared by a combination of doping, wet etching in oxalic acid solution, and metal–organic chemical vapor deposition (MOCVD). Compared with the epitaxial growth of LEDs (EG LEDs), NP LEDs show a decreased surface roughness, an enhanced luminescence intensity, and a blue shift of the luminescence peak. The enhancement of luminescence intensity can be attributed to the enhancement of internal quantum efficiency related to the increased crystal quality of MQWs, as well as increasing light extraction efficiency caused by the light-guiding effect of nanopore arrays in MQWs and the light reflection effect of nanoporous GaN distributed Bragg mirrors. The blue shift phenomenon is due to the stress relaxation of MQWs and the decreased In content.</p>","PeriodicalId":34,"journal":{"name":"Crystal Growth & Design","volume":"24 22","pages":"9556–9563 9556–9563"},"PeriodicalIF":3.2000,"publicationDate":"2024-11-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Formation and Markedly Enhanced Optical Properties of Large-Area Nanoporous InGaN-Based LEDs with Nanoporous GaN Distributed Bragg Mirrors\",\"authors\":\"Tiantian Luo, Dezhong Cao*, Feifei Wang, He Wang, Xiaodong Yan, Wangxin Gao, Mengqi Tian, Yuxuan Diwu, Zhengquan Guo, Qinglong Fang, Ningning Feng, Li Ma, Sen Wang, Dingze Lu, Song Feng, Xiaohua Ma and Yue Hao, \",\"doi\":\"10.1021/acs.cgd.4c0105110.1021/acs.cgd.4c01051\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p >Compared with nitric acid solution, oxalic acid solution has the advantages of safety, environmental protection, and a controllable etching rate. Large-area (20.3 cm<sup>2</sup>) nanoporous InGaN-based LEDs with nanoporous GaN distributed Bragg mirrors (NP LEDs) are prepared by a combination of doping, wet etching in oxalic acid solution, and metal–organic chemical vapor deposition (MOCVD). Compared with the epitaxial growth of LEDs (EG LEDs), NP LEDs show a decreased surface roughness, an enhanced luminescence intensity, and a blue shift of the luminescence peak. The enhancement of luminescence intensity can be attributed to the enhancement of internal quantum efficiency related to the increased crystal quality of MQWs, as well as increasing light extraction efficiency caused by the light-guiding effect of nanopore arrays in MQWs and the light reflection effect of nanoporous GaN distributed Bragg mirrors. The blue shift phenomenon is due to the stress relaxation of MQWs and the decreased In content.</p>\",\"PeriodicalId\":34,\"journal\":{\"name\":\"Crystal Growth & Design\",\"volume\":\"24 22\",\"pages\":\"9556–9563 9556–9563\"},\"PeriodicalIF\":3.2000,\"publicationDate\":\"2024-11-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Crystal Growth & Design\",\"FirstCategoryId\":\"92\",\"ListUrlMain\":\"https://pubs.acs.org/doi/10.1021/acs.cgd.4c01051\",\"RegionNum\":2,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Crystal Growth & Design","FirstCategoryId":"92","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acs.cgd.4c01051","RegionNum":2,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
摘要
与硝酸溶液相比，草酸溶液具有安全、环保和蚀刻速率可控等优点。通过掺杂、草酸溶液中的湿法蚀刻和金属有机化学气相沉积（MOCVD）相结合的方法，制备出了具有纳米多孔 GaN 分布布拉格反射镜的大面积（20.3 cm2）纳米多孔 InGaN 基 LED（NP LED）。与外延生长的发光二极管（EG LED）相比，NP LED 的表面粗糙度降低，发光强度增强，发光峰发生蓝移。发光强度的增强可归因于 MQWs 晶体质量的提高带来的内部量子效率的增强，以及 MQWs 中纳米孔阵列的光导效应和纳米多孔 GaN 分布布拉格反射镜的光反射效应带来的光萃取效率的提高。蓝移现象是由于 MQW 的应力松弛和 In 含量的降低造成的。
Formation and Markedly Enhanced Optical Properties of Large-Area Nanoporous InGaN-Based LEDs with Nanoporous GaN Distributed Bragg Mirrors
Compared with nitric acid solution, oxalic acid solution has the advantages of safety, environmental protection, and a controllable etching rate. Large-area (20.3 cm2) nanoporous InGaN-based LEDs with nanoporous GaN distributed Bragg mirrors (NP LEDs) are prepared by a combination of doping, wet etching in oxalic acid solution, and metal–organic chemical vapor deposition (MOCVD). Compared with the epitaxial growth of LEDs (EG LEDs), NP LEDs show a decreased surface roughness, an enhanced luminescence intensity, and a blue shift of the luminescence peak. The enhancement of luminescence intensity can be attributed to the enhancement of internal quantum efficiency related to the increased crystal quality of MQWs, as well as increasing light extraction efficiency caused by the light-guiding effect of nanopore arrays in MQWs and the light reflection effect of nanoporous GaN distributed Bragg mirrors. The blue shift phenomenon is due to the stress relaxation of MQWs and the decreased In content.
期刊介绍：
The aim of Crystal Growth & Design is to stimulate crossfertilization of knowledge among scientists and engineers working in the fields of crystal growth, crystal engineering, and the industrial application of crystalline materials.
Crystal Growth & Design publishes theoretical and experimental studies of the physical, chemical, and biological phenomena and processes related to the design, growth, and application of crystalline materials. Synergistic approaches originating from different disciplines and technologies and integrating the fields of crystal growth, crystal engineering, intermolecular interactions, and industrial application are encouraged.
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