在工业温度范围内频率稳定性达 ±100 ppb 的烘箱控制压电 MEMS 双谐振器平台

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2024-11-08 DOI:10.1016/j.sna.2024.116019

Yuhao Xiao , Kewen Zhu , Jinzhao Han , Fang Dong , Chengliang Sun , Sheng Liu , Guoqiang Wu

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引用次数: 0

摘要

这项工作展示了一个具有烤箱控制功能的压电 MEMS 双谐振器平台。该平台包括一个片内微型烤箱，其中集成了一个频率输出谐振器和一个温度感应谐振器。两个谐振器使用锁相环系统工作，其中一个为宽度扩展（WE）模式，另一个为宽度剪切（WS）模式。建立了双谐振器平台的等效热模型，两个谐振器都表现出极其均匀的温度分布。通过测量两个谐振器之间的频率差来监测谐振器的实时温度，并实施闭环烤箱控制，以将双谐振器平台保持在烤箱设定的温度下。所报告的烤箱控制压电 MEMS 双谐振器平台在 -40 至 85 °C 的工业温度范围内显示出 ±100 ppb 的测量频率稳定性。这一结果标志着该器件在高端定时应用中的巨大潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ±100 ppb over industrial temperature range

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An oven controlled piezoelectric MEMS dual-resonator platform with frequency stability of ±100 ppb over industrial temperature range

This work demonstrates a piezoelectric MEMS dual-resonator platform with an oven control. The platform includes a micro-oven in-chip, which integrates a frequency output resonator and a temperature sensing resonator. The two resonators operate using a phase-locked loop system, one in width-extensional (WE) mode and the other in width-shear (WS) mode. An equivalent thermal model of the dual-resonator platform is established and both resonators exhibit extremely uniform temperature distributions. The real-time temperature of the resonators is monitored by measuring the frequency difference between the two resonators and a closed-loop oven control is implemented to maintain the dual-resonator platform at an oven-set temperature. The reported oven controlled piezoelectric MEMS dual-resonator platform exhibits a measured frequency stability of

\pm

100 ppb across the industrial temperature range of

-

40 to 85 °C. This result signifies the promising potential of the device in high-end timing applications.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...