利用具有时变轨迹的异形振动切割在金属玻璃上制作角梯度梯度光栅

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2024-11-12 DOI:10.1016/j.precisioneng.2024.11.002

Wei Dai , Pingfa Feng , Zhimeng Chen , Feng Feng , Mengying Luan , Jianjian Wang

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引用次数: 0

摘要

为了解决传统红外光栅覆盖波段窄的问题，人们发明了一种新型衍射光栅，并将其命名为角梯度埃歇尔光栅。这种光栅的焰角沿着光栅槽的方向逐渐变化，可以说是在一个光栅上刻蚀了无数个不同焰角的子光栅，打破了传统光栅焰角数量的限制。此外，为了解决角梯度榭层光栅的加工问题，还开发了一种新的加工方法--具有时变轨迹的异形振动切割（SVC）。通过探讨不同加工参数对光栅加工结果的影响，提出了合适的加工方案。最终，在金属玻璃这种难以加工的材料上制造出了炽热角从 30°到 55°不等、表面粗糙度低至 20 nm 的角梯度埃歇尔光栅。

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Fabrication of angle-gradient echelle grating on metallic glass using shaped vibration cutting with time-varying trajectory

In order to solve the problem of narrow band coverage of traditional infrared gratings, a new type of diffraction grating is invented and named as angle-gradient echelle grating. The blaze angle of the grating gradually changes along the direction of the grating grooves, which can be regarded as etching countless sub-gratings with different blaze angles on a grating, breaking the limitation of the number of blaze angles of traditional gratings. In addition, in order to solve the processing problem of angle-gradient echelle grating, a new processing method, shaped vibration cutting (SVC) with a time-varying trajectory is developed. By exploring the influence of different processing parameters on the grating processing results, a suitable processing plan was proposed. Eventually, angle-gradient echelle grating with blaze angles varying from 30° to 55° and surface roughness of as low as 20 nm was fabricated on metallic glass, a material that is difficult to machine.

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来源期刊

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 工程技术-工程：制造

CiteScore

7.40

自引率

5.60%

发文量

177

审稿时长

46 days

期刊介绍： Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.