A Nano-Platinum-Thin-Film Sensor With Milli-Thermal Resolution and Microsec Response

Monitoring milli-thermal variations and achieving high dynamic response are crucial aspects of temperature sensor technology. Achieving high dynamic response requires a delicate structure design of temperature sensor, which can minimize its thermal capacity to facilitate quick reactions while keeping enough mechanical robustness. In this study, we introduce an innovative nano-platinum-thin-film sensor with an exceptionally low thermal capacity. With the dimensions of $10~\mu $ m $\times 2~\mu $ m $\times 30$ nm ( $0.6~\mu $ m3), this sensor is meticulously engineered to offer a high dynamic resolution of 0.016° C, a response time of 21 ms in water drop experiments, and a high-frequency dynamic response capability up to 20 kHz. Its time constant, approximately $25.5~\mu $ s for nominal temperature change, highlights its ability to capture transient thermal events effectively. The sensor’s high dynamic characteristics render it uniquely suited for applications demanding the detection of rapid thermal phenomena, such as object impacts and high-frequency thermal fluctuations, which are crucial in a variety of scientific and industrial fields.