基于 PET 薄膜的高性能光纤高频悬臂声学传感器

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2024-10-03 DOI:10.1109/JSEN.2024.3452788

Guojie Wu;Xinyu Zhang;Zhenfeng Gong;Pengcheng Tao;Wei Peng;Qingxu Yu;Liang Mei

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引用次数: 0

摘要

本文介绍了一种高性能光纤聚对苯二甲酸乙二酯（PET）悬臂声换能器（PET-CAT），用于感应微弱的声信号。PET 悬臂由激光打标机制造。所用 PET-CAT 的杨氏模量比传统的不锈钢悬臂低约 40 倍，因此声压检测灵敏度更高。通过理论和仿真分析，设计出了用于高性能声学传感的 PET-CAT。实验表明，PET-CAT 在 2823 Hz 时的灵敏度高达 8004.6 nm/Pa，在 3300 Hz 时的灵敏度高达 605 nm/Pa。3300 Hz 时的等效噪声声压（ENSP）为 2.48~\mu $ Pa/Hz $^{text{1/2}}$。所提出的 PET-CAT 具有体积小、成本低、加工简单、化学性质稳定、灵敏度高、抗电磁干扰能力强等特点，适用于高频微弱信号的远距离传感。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High-Performance Fiber Optic High-Frequency Cantilever Acoustical Transducer Based on PET Film

In this article, a high-performance fiber optic polyethylene terephthalate (PET) cantilever acoustic transducer (PET-CAT) is reported for weak acoustic signal sensing. The PET cantilever is manufactured by laser marking machines. The Young modulus of the PET-CAT used is roughly 40 times lower than that of conventional stainless-steel cantilever, resulting in higher acoustic pressure detection sensitivity. The theoretical and simulation analysis has been carried out to design the PET-CAT for high-performance acoustic sensing. Experiments have shown that the sensitivities of the PET-CAT reach up to 8004.6 nm/Pa at 2823 Hz and 605 nm/Pa at 3300 Hz. The equivalent noise sound pressure (ENSP) is

$2.48~\mu $

Pa/Hz

$^{\text {1/2}}$

at 3300 Hz. The proposed PET-CAT, featuring compact size, low cost, simple processing, chemical stability, high sensitivity, and strong resistance to electromagnetic interference, is suitable for high-frequency weak signal long-distance sensing.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice