通过引入超薄中间氧化物层,在 LiNbO3/SiC 上实现高性能 LL-SAW 谐振器的带边调制。

IF 3.8 2区 物理与天体物理 Q1 ACOUSTICS
Juxing He , Shibin Zhang , Pengcheng Zheng , Xiaoli Fang , Hulin Yao , Mijing Sun , Dongchen Sui , Yanlong Yao , Chongxi Song , Zheng Zhou , Xin Ou
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引用次数: 0

摘要

随着快速信息传输需求的不断增长,高频声学滤波设备已成为当务之急。具有独特优势的纵向泄漏表面声波(LL-SAW)器件是一个前景广阔的平台。本文在 X 切碳化硅铌酸锂(LiNbO3/SiC)中引入了 100 nm 的中间氧化层,以改善 LL-SAW 谐振器的带内性能。首先,我们用有限元法分析了结构的色散曲线。在这一部分,我们成功地解释了在一般设计中,LiNbO3/SiC 上的 LL-SAW 固有的低品质因数(Q),并预测了通过引入中间氧化物层来增强 Q 值,而不会降低杂散响应。然后,制作并测量了模拟中考虑的单端口谐振器。结果证实,整个通带的 Bode Q 值都有所提高。与现有器件相比,谐振器的性能处于领先地位。所制作的谐振器的峰谷导纳比为 63.87 dB,远近端 Bode Q 值分别为 ∼300 和 ∼530,keff2 为 15.66 %,相位速度为 6187.3 m/s。此外,SH1 模式的共振频率也变高了。这项工作有助于设计下一代高频移动通信滤波器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Band edge modulation for high-performance LL-SAW resonators on LiNbO3/SiC by introducing an ultra-thin intermediate oxide layer
With the exploding demand of rapid information transmission, high-frequency acoustic filtering devices are becoming an immediate need. Longitudinal leaky surface acoustic wave (LL-SAW) devices with unique advantages can be a promising platform. In this paper, we introduce a 100 nm intermediate oxide layer into the X-cut lithium niobate on silicon carbide (LiNbO3/SiC) to improve the in-band performance of LL-SAW resonators. First, the dispersion curves of the structures are analyzed by finite element method. In this part, we successfully interpret the intrinsic low quality factor (Q) of LL-SAW on LiNbO3/SiC in general design, and predict the enhancement of Q by introducing an intermediate oxide layer without degradation on spurious response. Then, one port resonators considered in the simulation are fabricated and measured. As a result, enhancements in Bode Q among the whole passband are confirmed. Compared with devices state of art, resonators with leading performances are demonstrated. The fabricated resonators have peak-valley admittance ratio of 63.87 dB, Bode Q of ∼300 at fr and ∼530 at far, keff2of 15.66 % and phase velocity of 6187.3 m/s. Additionally, the resonant frequency of SH1 mode shifts to higher frequency. This work enables the design of next generation high frequency mobile communication filters.
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来源期刊
Ultrasonics
Ultrasonics 医学-核医学
CiteScore
7.60
自引率
19.00%
发文量
186
审稿时长
3.9 months
期刊介绍: Ultrasonics is the only internationally established journal which covers the entire field of ultrasound research and technology and all its many applications. Ultrasonics contains a variety of sections to keep readers fully informed and up-to-date on the whole spectrum of research and development throughout the world. Ultrasonics publishes papers of exceptional quality and of relevance to both academia and industry. Manuscripts in which ultrasonics is a central issue and not simply an incidental tool or minor issue, are welcomed. As well as top quality original research papers and review articles by world renowned experts, Ultrasonics also regularly features short communications, a calendar of forthcoming events and special issues dedicated to topical subjects.
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