大电流磁控放电石墨阴极的辉光到电弧转变

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2024-11-12 DOI:10.1063/5.0238958

Erwan Morel, Yoann Rozier, Tiberiu Minea

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引用次数: 0

摘要

辉光到电弧的转变是等离子体放电中的一个关键现象，通常会导致有害影响。人们对引发这一转变的物理机制仍然知之甚少。一种名为超功率脉冲磁控管的放电装置的出现为我们提供了可能性。超功率脉冲磁控管允许在长时间（1 毫秒）和高电流密度（>5 A .cm-2）下保持辉光模式，这揭示了辉光到电弧转变的某些特征。这项工作的重点是容易过渡到电弧状态的石墨靶。高速摄像分析揭示了石墨在 ExB 放电中的特殊性质，而电弧过渡的统计研究则揭示了与其他耐火靶材料的不同之处。阴极斑点形成的早期阶段（观察到的亮点）将在已知的斑点形成的 "外生 "和 "汽化 "模型中进行介绍和分析。这项实验研究强调了在电弧转换之前形成光斑的作用，以及对磁控管放电稳定性的可能优化。

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Glow-to-arc transition in graphite cathode with high-current magnetron discharge

The glow-to-arc transition is a critical phenomenon in plasma discharges, commonly leading to detrimental effects. The physical mechanisms triggering this transition remain poorly understood. The advent of a discharge called Hyper-Power Impulse Magnetron has opened possibilities. Hyper-Power Impulse Magnetron allows the glow mode to be maintained over long periods (1 ms) and at high-current densities (>5 A .cm−2), which has unveiled certain features in the glow-to-arc transition. This work focuses on a graphite target that transits easily in the arc regime. The high-speed video-camera analysis revealed specific properties of graphite in ExB discharges, and the statistical study of the arc transition revealed differences from other refractory target materials. The early stage of cathodic spot formation, observed as bright dots, will be presented and analyzed within the known “ecton” and “vaporization” models for spot formation. This experimental study highlights the role of luminous spot formation prior to arc transition, with possible optimization on the stability of magnetron discharges.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.