大功率氮化镓基蓝色激光二极管的降解研究与抗老化解决方案

IF 3.7 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Enming Zhang, Yue Zeng, Wenyu Kang, Zhibai Zhong, Yushou Wang, Tongwei Yan, Shaohua Huang, Zhongying Zhang, Kechuang Lin, Junyong Kang
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引用次数: 0

摘要

基于氮化镓(GaN)的半导体激光二极管(LD)因其广阔的应用前景而备受关注。然而,高功率 LD 面临着严重的降解问题,限制了其实际应用。本研究通过比较老化 1000 小时前后的光-电流-电压(L-I-V)特性、透射电子显微镜(TEM)、阴极发光(CL)和二次离子质谱(SIMS),研究了 437 nm 和 6.3 W LD 的降解因子。研究发现,镜面涂层从谐振腔表面扩散是导致大功率 LD 退化的一个关键因素,而这在毫瓦级 LD 中尚未见报道。同时,对 LD 退化背后的机制进行了剖析,并结合扩散和其他因素进行了总结。在机理探索的基础上,利用氮化铝作为钝化层和蓝宝石材料作为镜面膜,开发出了大功率氮化镓基 LD 的抗老化技术。该研究阐明了大功率氮化镓基 LD 的降解机理,为延长其使用寿命提供了有效技术,从而推动了大功率 LD 的实际应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

High-Power GaN-Based Blue Laser Diodes Degradation Investigation and Anti-aging Solution

High-Power GaN-Based Blue Laser Diodes Degradation Investigation and Anti-aging Solution

Gallium nitride (GaN)-based semiconductor laser diodes (LDs) have garnered significant attention due to their promising applications. However, high-power LDs face serious degradation issues that limit their practical use. This study investigates the degradation factors of 437 nm and 6.3 W LDs by comparing light–current–voltage (L–I–V) characteristics, transmission electron microscopy (TEM), cathodoluminescence (CL), and secondary ion mass spectroscopy (SIMS) before and after 1000-h aging. The diffusion of mirror coating from the resonant cavity surface is identified as a key factor contributing to high-power LD degradation, which has not been reported in milliwatt-level LDs. Meanwhile, the mechanisms behind the LD degradation are profiled and summarized together with the diffusion and other factors. On basis of the mechanism exploration, an anti-aging technology for high-power GaN-based LDs is developed by using aluminum nitride for passivation layer and sapphire materials for mirror film. This anti-aging technology has been verified, and a nearly ten-time degradation suppression is achieved from 1000 h. This study elucidates the degradation mechanisms of high-power GaN LDs and provides an effective technology to extend their lifespan, thereby prompting the practical applications of high-power LDs.

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