碳化硅高科技陶瓷--激光工艺比较

Christian Rochholz, Andreas Meudtner
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引用次数: 0

摘要

广泛的研究与开发应用了各种激光源(从纳秒 VIS 波长到飞秒红外激光器和喷水导引激光器),以提高碳化硅激光成型、精细切割和钻孔的质量和效率。测试的重点是表面粗糙度、切割线精度和高烧蚀率。由于材料成分(如金刚石层)的多样性,需要采用综合方法来开发可行的方法。为了满足经济上的限制,机械研磨与循环激光加工相结合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SiC high-tech ceramics — a comparison of laser processes

Extensive R&D applied various laser sources — from nanosecond VIS-wavelength to femtosecond IR and water-jet guided lasers — to enhance the quality and efficiency of laser structuring, fine cutting, and drilling of silicon carbide. Tests focused on surface roughness, cutting line precision, and high ablation rates. Challenges due to diverse material compositions, like diamond layers, required combined methods to develop viable approaches. To meet economic constraints, mechanical grinding was integrated with recurring laser processing.

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