{"title":"质子源靶用磁控反应溅射法制备的氘化铒薄膜的相位和成分分析","authors":"","doi":"10.1016/j.nimb.2024.165558","DOIUrl":null,"url":null,"abstract":"<div><div>This study explores the synthesis and characterization of erbium deuteride (ErD<sub>x</sub>) thin films using magnetron reactive sputtering (MRS) under varying deuterium gas flow rates. The findings reveal that the stoichiometric ratio of deuterium to erbium (D/Er) can be effectively controlled by adjusting the D<sub>2</sub> flow rate, transitioning compositions from ErD<sub>2</sub> to ErD<sub>3</sub>. All films exhibited a cubic structure, with deuterium atoms occupying both tetrahedral and octahedral sites. Compared to the traditional two-step method, MRS-prepared films showed lower oxidation levels and higher preparation efficiency. Proton-source quality evaluation (PQE) confirmed the suitability of these films as high-quality targets. Additionally, this study introduces a rapid IBA method applicable during PQE, offering a non-destructive and cost-effective means to determine the composition within films.</div></div>","PeriodicalId":19380,"journal":{"name":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","volume":null,"pages":null},"PeriodicalIF":1.4000,"publicationDate":"2024-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Phase and composition analysis of erbium deuteride thin films prepared by magnetron reactive sputtering for proton source target\",\"authors\":\"\",\"doi\":\"10.1016/j.nimb.2024.165558\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This study explores the synthesis and characterization of erbium deuteride (ErD<sub>x</sub>) thin films using magnetron reactive sputtering (MRS) under varying deuterium gas flow rates. The findings reveal that the stoichiometric ratio of deuterium to erbium (D/Er) can be effectively controlled by adjusting the D<sub>2</sub> flow rate, transitioning compositions from ErD<sub>2</sub> to ErD<sub>3</sub>. All films exhibited a cubic structure, with deuterium atoms occupying both tetrahedral and octahedral sites. Compared to the traditional two-step method, MRS-prepared films showed lower oxidation levels and higher preparation efficiency. Proton-source quality evaluation (PQE) confirmed the suitability of these films as high-quality targets. Additionally, this study introduces a rapid IBA method applicable during PQE, offering a non-destructive and cost-effective means to determine the composition within films.</div></div>\",\"PeriodicalId\":19380,\"journal\":{\"name\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2024-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0168583X24003288\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0168583X24003288","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Phase and composition analysis of erbium deuteride thin films prepared by magnetron reactive sputtering for proton source target
This study explores the synthesis and characterization of erbium deuteride (ErDx) thin films using magnetron reactive sputtering (MRS) under varying deuterium gas flow rates. The findings reveal that the stoichiometric ratio of deuterium to erbium (D/Er) can be effectively controlled by adjusting the D2 flow rate, transitioning compositions from ErD2 to ErD3. All films exhibited a cubic structure, with deuterium atoms occupying both tetrahedral and octahedral sites. Compared to the traditional two-step method, MRS-prepared films showed lower oxidation levels and higher preparation efficiency. Proton-source quality evaluation (PQE) confirmed the suitability of these films as high-quality targets. Additionally, this study introduces a rapid IBA method applicable during PQE, offering a non-destructive and cost-effective means to determine the composition within films.
期刊介绍:
Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.