在工业规模的 HiPIMS 系统中沉积的 TiN/CrN 和 TiSiN/CrN 多层涂层的微观结构和机械性能：硅掺入量的影响

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2024-10-30 DOI:10.1016/j.surfcoat.2024.131461

N. Sala , M. Rebelo de Figueiredo , R. Franz , C. Kainz , J.C. Sánchez-López , T.C. Rojas , D. Fernández de los Reyes , C. Colominas , M.D. Abad

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引用次数: 0

摘要

通过沉积先进涂层，特别是多层涂层进行表面工程，以提高涂层部件的性能，已引起人们的极大兴趣。在 TiN 涂层中加入 Si 有望提高硬度、抗氧化性和热稳定性，而高功率脉冲磁控溅射 (HiPIMS) 已成为一种沉积具有特殊性能涂层的技术。然而，通过 HiPIMS 沉积的 TiN/CrN 和 TiSiN/CrN 涂层仍相对缺乏研究。在这项研究中，使用工业规模的 HiPIMS 反应器沉积了不同的 TiN/CrN 和 TiSiN/CrN 多层涂层，其双层层周期从 5 纳米到 85 纳米不等，并使用先进的表征技术研究了它们的微观结构和机械性能。结果表明，成功沉积出了具有可控双层周期的光滑致密涂层。X 射线衍射分析表明，双层周期较高的涂层具有独立的结晶相，而双层周期较小的涂层则表现出峰值重叠和超晶格泛音，尤其是在 TiN/CrN 涂层中。高分辨率透射电子显微镜（HRTEM）证实了外延晶粒生长。高分辨透射电子显微镜（HRTEM）和电子能量损失光谱测量证实，硅加入到 TiSiN/CrN 涂层的 TiN 晶格中降低了结晶度，尤其是双层周期较小的涂层。纳米压痕测试表明，无论成分如何，双层周期为 15-20 nm 的涂层显示出最高的硬度值。与 TiN/CrN 涂层相比，TiSiN/CrN 涂层的机械性能没有改善，这归因于 Si 诱导了 Ti(Si)N 相的非晶化，以及这些涂层中的 TiN 纳米晶内没有 SiNx 相偏析。这些发现为在工业规模反应器中通过 HiPIMS 沉积 TiN/CrN 和 TiSiN/CrN 多层涂层的微观结构和机械性能提供了宝贵的见解，为它们在各种工业领域的应用铺平了道路。

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Microstructural and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited in an industrial-scale HiPIMS system: Effect of the Si incorporation

Surface engineering through the deposition of advanced coatings, particularly multilayer coatings has gained significant interest for enhancing the performance of coated parts. The incorporation of Si into TiN coatings has shown promise for improving hardness, oxidation resistance, and thermal stability, while high-power impulse magnetron sputtering (HiPIMS) has emerged as a technique to deposit coatings with exceptional properties. However, TiN/CrN and TiSiN/CrN coatings deposited by HiPIMS remain relatively unexplored. In this study, different TiN/CrN and TiSiN/CrN multilayer coatings with different bilayer periods from 5 to 85 nm were deposited using an industrial-scale HiPIMS reactor, and their microstructure and mechanical properties were investigated using advanced characterization techniques. Results revealed successful deposition of smooth and compact coatings with controlled bilayer periods. X-ray diffraction analysis showed separate crystalline phases for coatings with high bilayer periods, while those with smaller bilayer periods exhibited peak-overlapping and superlattice overtones, especially for the TiN/CrN coatings. Epitaxial grain growth was confirmed by high-resolution transmission electron microscopy (HRTEM). HRTEM and electron energy-loss spectroscopy measurements confirmed Si incorporation into the TiN crystal lattice of TiSiN/CrN coatings reducing the crystallinity, especially for coatings with smaller bilayer periods. Nanoindentation tests revealed that coatings with a bilayer period of 15–20 nm displayed the highest hardness values regardless of the composition. The mechanical properties of the TiSiN/CrN coatings showed no improvement over those of the TiN/CrN coatings, attributed to the Si induced amorphization of the Ti(Si)N phase and the absence of SiN_x phase segregation within the TiN nanocrystals in these coatings. These findings provide valuable insights into the microstructure and mechanical properties of TiN/CrN and TiSiN/CrN multilayer coatings deposited by HiPIMS in an industrial scale reactor, paving the way for their application in various industrial sectors.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.