利用液晶相位调制器开发空间分辨率增强型数字全息显微镜

IF 2.1 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2024-10-16 DOI:10.1109/JPHOT.2024.3481418

Ha-Mong Shim;Ki-Dong Lim;Min-Kyu Park;Kwang-Hoon Lee;Jin Hyeok Kim;Sungjin Lim;Kyung-Il Joo

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引用次数: 0

摘要

通过采用液晶相位调制器（LCPM），我们提出了一种与基于偏振相机的 DHM 系统相比空间分辨率更高的 DHM 系统。基于液晶相位调制器的全息干涉光学系统可通过改变外加电压可靠地构建四步移相方案，从而无需机械运动部件。利用 1951 年美国空军分辨率目标分析了拟议 DHM 系统的空间分辨率特性。与基于偏振相机的 DHM 系统相比，这些特性提高了四倍。此外，通过使用半导体制造工艺生产的通孔阵列样品，实验证实了拟议的 DHM 系统的三维信息捕获能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of a Spatial Resolution-Enhanced Digital-Hologram Microscope With a Liquid Crystal Phase Modulator

We proposed a DHM system with improved spatial resolution compared with that of the polarized camera-based DHM system by employing a liquid crystal phase modulator (LCPM). The LCPM-based holographic interferometry optical system can reliably construct a four-step phase shifting scheme by changing the applied voltage, thus eliminating the need for mechanical moving parts. The spatial resolution characteristics of the proposed DHM system were analyzed using the 1951 USAF resolution target. These characteristics showed a fourfold improvement over the polarized camera-based DHM system. Additionally, the 3D information capturing capability of the proposed DHM system was experimentally confirmed using a via-hole array sample produced through the semiconductor fabrication process.

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.