(Al0.18Ga0.82)2O3上 Ti/Au、Ni/Au 和 Sc/Au 欧姆接触金属叠层的比较

IF 3.5 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Materials Science Pub Date : 2024-10-17 DOI:10.1007/s10853-024-10330-2

Hsiao-Hsuan Wan, Chao-Ching Chiang, Jian-Sian Li, Fan Ren, Fikadu Alema, Andrei Osinsky, Valentin Craciun, Stephen J. Pearton

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引用次数: 0

摘要

通过金属有机化学气相沉积法生长的 300 纳米厚 (Al0.18Ga0.82)2O3 层与掺硅 n 型 (4.1 × 1019 cm-3)的欧姆金属接触，对三种不同的金属堆栈（即 Ti/Au、Ni/Au 和 Sc/Au）进行了研究。这是用于 (AlxGa1-x)2O3 /Ga2O3 异质结构场效应晶体管的典型成分。沉积后退火（300-475 °C）的影响是通过圆周转移长度法（CTLM）测量来确定转移电阻和比接触电阻率的。钛/金的电阻最低，其比接触电阻率为 1.2 × 10-4 Ω-cm2，原沉积触点的转移电阻为 3.82 Ω-mm。在所有情况下，退火都会使上述两个电阻值从沉积值下降，尽管在 475 °C 退火后，AGO 薄膜电阻略有下降，从 1191 Ω/□ 降至 905 Ω/□。此外，还研究了比接触电阻率的温度依赖性。

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Comparison of Ti/Au, Ni/Au, and Sc/Au ohmic contact metal stacks on (Al0.18Ga0.82)2O3

Three different metal stacks, namely Ti/Au, Ni/Au and Sc/Au, were examined as Ohmic metal contacts to Si-doped, n-type (4.1 × 10¹⁹ cm⁻³), 300-nm thick (Al_0.18Ga_0.82)₂O₃ layers grown by metal-organic chemical vapor deposition. This is a typical composition used for (Al_xGa_1-x)₂O₃ /Ga₂O₃ heterostructure field effect transistors. The effects of postdepositional annealing (300–475 °C) were examined through circular transfer length method (CTLM) measurements to determine both the transfer resistance and specific contact resistivity. The lowest resistances were achieved with Ti/Au, with specific contact resistivity 1.2 × 10^–4 Ω·cm² and transfer resistance 3.82 Ω·mm for as-deposited contacts. Annealing was found to degrade both of these resistances in all cases from the as-deposited values, even though the AGO sheet resistance decreased slightly, from 1191 Ω/□ to 905 Ω/□ after annealing at 475 °C. The temperature dependence of specific contact resistivity is also investigated.

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来源期刊

Journal of Materials Science 工程技术-材料科学：综合

CiteScore

7.90

自引率

4.40%

发文量

1297

审稿时长

2.4 months

期刊介绍： The Journal of Materials Science publishes reviews, full-length papers, and short Communications recording original research results on, or techniques for studying the relationship between structure, properties, and uses of materials. The subjects are seen from international and interdisciplinary perspectives covering areas including metals, ceramics, glasses, polymers, electrical materials, composite materials, fibers, nanostructured materials, nanocomposites, and biological and biomedical materials. The Journal of Materials Science is now firmly established as the leading source of primary communication for scientists investigating the structure and properties of all engineering materials.