微激光辅助金刚石切削对多晶 ZnS 加工性的研究

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2024-10-21 DOI:10.3390/mi15101275
Haoqi Luo, Xue Wang, Lin Qin, Hongxin Zhao, Deqing Zhu, Shanyi Ma, Jianguo Zhang, Junfeng Xiao
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引用次数: 0

摘要

多晶 ZnS 是一种典型的红外光学材料。由于其优异的光学特性,它被广泛应用于先进的光学系统中。多晶 ZnS 光学元件的加工精度必须满足高性能系统开发的要求。然而,该材料的软脆性质给高质量和高效率的加工带来了挑战。近年来,原位激光辅助金刚石切割已被证明是脆性材料超精密切割的有效方法。本研究探讨了原位激光辅助切割对 ZnS 超精密切削加工性能提升的机理。首先,通过高温纳米压痕实验对 ZnS 的物理性质进行了表征。结果表明,ZnS 在高温下的塑性变形导致其延展性增加,而显微硬度和杨氏模量则有所下降。这为 ZnS 的韧性-脆性转变提供了基础理论。随后,进行了一系列金刚石切割实验,研究了原位激光辅助切割过程中 ZnS 的去除机理。结果发现,原位激光辅助切割产生的质量损伤起始深度沟槽比普通切割产生的沟槽增加了 57.99%。研究发现,原位激光辅助切割抑制了微米级凹坑的产生。HIP-ZnS 的主要损伤形式从片状剥落和凹坑转变为径向裂纹。此外,激光还能抑制不同晶粒结晶的去除模式差异,确保韧性区域的加工。最后,进行了规划切割实验,验证了在 20 W 激光功率下可获得 Sa 为 3.607 nm 的光滑均匀表面,比普通切割提高了 73.58%。粗糙度的主要成分是晶界阶梯和亚微米凹坑。这项研究为 ZnS 的超精密切割提供了一种可行的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation on the Machinability of Polycrystalline ZnS by Micro-Laser-Assisted Diamond Cutting.

Polycrystalline ZnS is a typical infrared optical material. It is widely used in advanced optical systems due to its excellent optical properties. The machining accuracy of polycrystalline ZnS optical elements must satisfy the requirements of high-performance system development. However, the soft and brittle nature of the material poses a challenge for high-quality and efficient machining. In recent years, in situ laser-assisted diamond cutting has been proven to be an effective method for ultra-precision cutting of brittle materials. In this study, the mechanism of in situ laser-assisted cutting on ultra-precision cutting machinability enhancement of ZnS was investigated. Firstly, the physical properties of ZnS were characterized by high-temperature nanoindentation experiments. The result revealed an increase in ductile machinability of ZnS due to plastic deformation and a decrease in microhardness and Young's modulus at high temperatures. It provided a fundamental theory for the ductile-brittle transition of ZnS. Subsequently, a series of diamond-cutting experiments were carried out to study the removal mechanism of ZnS during in situ laser-assisted cutting. It was found that the mass damage initiation depth groove generated by in situ laser-assisted cutting increased by 57.99% compared to the groove generated by ordinary cutting. It was found that micron-sized pits were suppressed under in situ laser-assisted cutting. The main damage form of HIP-ZnS was changed from flake spalling and pits to radial cleavage cracks. Additionally, the laser can suppress the removal mode difference of different grain crystallographic and ensure the ductile region processing. Finally, planning cutting experiments were carried out to verify that a smooth and uniform surface with Sa of 3.607 nm was achieved at a laser power of 20 W, which was 73.58% better than normal cutting. The main components of roughness were grain boundary steps and submicron pit. This study provides a promising method for ultra-precision cutting of ZnS.

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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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