在 42°Y-X LiTaO3/SiO2/Poly-Si/Si 基底上形成蜂窝状声波晶体,以提高性能并实现微型化。

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2024-10-14 DOI:10.3390/mi15101256
Panliang Tang, Hongzhi Pan, Temesgen Bailie Workie, Jia Mi, Jingfu Bao, Ken-Ya Hashimoto
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引用次数: 0

摘要

采用多层压电基板的声表面波器件因其 Q 值高而性能卓越。多层压电基板与能够以极小阵列反射声波的声子晶体结构相结合,可实现微型化和高性能。本文提出了一种基于 42°Y-X LT/SiO2/poly-Si/Si 层衬底的蜂窝状声子晶体结构。利用色散和透射特性分析了不同填充分数下的带隙分布。为了研究 PnCs 在声表面波器件中的应用,对具有不同反射器的单端口谐振器进行了比较和分析。根据频率响应曲线和 Bode-Q 值曲线发现,当使用 HC-PnC 结构作为反射器时,不仅能改善谐振器的传输损耗,还能减小器件的尺寸。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Miniaturization.

A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In this paper, a honeycomb-shaped phononic crystal structure based on 42°Y-X LT/SiO2/poly-Si/Si-layered substrate is proposed. The analysis of the bandgap distribution under various filling fractions was carried out using dispersion and transmission characteristics. In order to study the application of PnCs in SAW devices, one-port resonators with different reflectors were compared and analyzed. Based on the frequency response curves and Bode-Q value curves, it was found that when the HC-PnC structure is used as a reflector, it can not only improve the transmission loss of the resonator but also reduce the size of the device.

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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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