{"title":"设计、测试和实验验证旋转振动辅助抛光装置 (RVAPD)，以提高加工和表面质量。","authors":"Silin Liu, Yan Gu, Jieqiong Lin, Zisu Xu, Tianyu Gao, Xinyang Liu, Xiaoming Zhang, Bingjin Yu","doi":"10.3390/mi15101242","DOIUrl":null,"url":null,"abstract":"<p><p>A rotary vibration-assisted polishing device (RVAPD) is designed to enhance polishing force by converting PZT's linear motion into the rotary motion of a central platform via a flexible mechanism, improving material surface quality. The RVAPD is optimized, simulated, and tested to meet high-frequency and large-amplitude non-resonant vibration polishing requirements. Its structure, designed using theoretical models and finite element software, offers a wide range of polishing parameters. Performance parameters are validated through open-loop tests, confirming effectiveness in polishing experiments. The lever mechanism and Hoeckens connection enhance vibration parameters and motion efficiency, reducing surface flaws in SiC and improving uniformity. Adjusting the RVAPD structure and using the proposed method significantly improve SiC surface quality.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2024-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509902/pdf/","citationCount":"0","resultStr":"{\"title\":\"Design, Testing, and Experimental Validation of a Rotary Vibration-Assisted Polishing Device (RVAPD) for Enhanced Machining and Surface Quality.\",\"authors\":\"Silin Liu, Yan Gu, Jieqiong Lin, Zisu Xu, Tianyu Gao, Xinyang Liu, Xiaoming Zhang, Bingjin Yu\",\"doi\":\"10.3390/mi15101242\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>A rotary vibration-assisted polishing device (RVAPD) is designed to enhance polishing force by converting PZT's linear motion into the rotary motion of a central platform via a flexible mechanism, improving material surface quality. The RVAPD is optimized, simulated, and tested to meet high-frequency and large-amplitude non-resonant vibration polishing requirements. Its structure, designed using theoretical models and finite element software, offers a wide range of polishing parameters. Performance parameters are validated through open-loop tests, confirming effectiveness in polishing experiments. The lever mechanism and Hoeckens connection enhance vibration parameters and motion efficiency, reducing surface flaws in SiC and improving uniformity. Adjusting the RVAPD structure and using the proposed method significantly improve SiC surface quality.</p>\",\"PeriodicalId\":18508,\"journal\":{\"name\":\"Micromachines\",\"volume\":\"15 10\",\"pages\":\"\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2024-10-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509902/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micromachines\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.3390/mi15101242\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"CHEMISTRY, ANALYTICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micromachines","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.3390/mi15101242","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
引用次数: 0
摘要
设计了一种旋转振动辅助抛光装置（RVAPD），通过柔性机构将 PZT 的线性运动转换为中央平台的旋转运动，从而增强抛光力，提高材料表面质量。RVAPD 经过优化、模拟和测试，可满足高频和大振幅非共振抛光要求。其结构采用理论模型和有限元软件设计，可提供多种抛光参数。通过开环测试验证了性能参数，并在抛光实验中证实了其有效性。杠杆机构和海肯斯连接提高了振动参数和运动效率，减少了碳化硅的表面缺陷并改善了均匀性。调整 RVAPD 结构和使用所提出的方法可显著改善 SiC 表面质量。
Design, Testing, and Experimental Validation of a Rotary Vibration-Assisted Polishing Device (RVAPD) for Enhanced Machining and Surface Quality.
A rotary vibration-assisted polishing device (RVAPD) is designed to enhance polishing force by converting PZT's linear motion into the rotary motion of a central platform via a flexible mechanism, improving material surface quality. The RVAPD is optimized, simulated, and tested to meet high-frequency and large-amplitude non-resonant vibration polishing requirements. Its structure, designed using theoretical models and finite element software, offers a wide range of polishing parameters. Performance parameters are validated through open-loop tests, confirming effectiveness in polishing experiments. The lever mechanism and Hoeckens connection enhance vibration parameters and motion efficiency, reducing surface flaws in SiC and improving uniformity. Adjusting the RVAPD structure and using the proposed method significantly improve SiC surface quality.
期刊介绍：
Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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