蚀刻方法对 III-V 和 II-VI 材料中出现缺陷水平的影响。

IF 4.4 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Nanomaterials Pub Date : 2024-10-09 DOI:10.3390/nano14191612

Kinga Majkowycz, Krzysztof Murawski, Małgorzata Kopytko, Krzesimir Nowakowski-Szkudlarek, Marta Witkowska-Baran, Piotr Martyniuk

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引用次数: 0

摘要

本文介绍了蚀刻方法对 InAs/InAsSb II 型超晶格（T2SLs）和 MCT 光电二极管中出现的缺陷水平的影响。对于这两种被分析的探测器，蚀刻过程采用了两种方法：湿化学蚀刻和使用离子束的干蚀刻（RIE-反应离子蚀刻）。采用深电平瞬态光谱 (DLTS) 方法确定了分析结构中出现的缺陷水平。研究结果表明，蚀刻方法的选择会影响 MCT 材料中额外缺陷水平的出现，但对于 InAs/InAsSb T2SLs 来说并不重要。

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The Influence of Etching Method on the Occurrence of Defect Levels in III-V and II-VI Materials.

The influence of the etching method on the occurrence of defect levels in InAs/InAsSb type-II superlattice (T2SLs) and MCT photodiode is presented. For both analyzed detectors, the etching process was performed by two methods: wet chemical etching and dry etching using an ion beam (RIE-reactive ion etching). The deep-level transient spectroscopy (DLTS) method was used to determine the defect levels occurring in the analyzed structures. The obtained results indicate that the choice of etching method affects the occurrence of additional defect levels in the MCT material, but it has no significance for InAs/InAsSb T2SLs.

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来源期刊

Nanomaterials NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.50

自引率

9.40%

发文量

3841

审稿时长

14.22 days

期刊介绍： Nanomaterials (ISSN 2076-4991) is an international and interdisciplinary scholarly open access journal. It publishes reviews, regular research papers, communications, and short notes that are relevant to any field of study that involves nanomaterials, with respect to their science and application. Thus, theoretical and experimental articles will be accepted, along with articles that deal with the synthesis and use of nanomaterials. Articles that synthesize information from multiple fields, and which place discoveries within a broader context, will be preferred. There is no restriction on the length of the papers. Our aim is to encourage scientists to publish their experimental and theoretical research in as much detail as possible. Full experimental or methodical details, or both, must be provided for research articles. Computed data or files regarding the full details of the experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material. Nanomaterials is dedicated to a high scientific standard. All manuscripts undergo a rigorous reviewing process and decisions are based on the recommendations of independent reviewers.