{"title":"低温制备用于柔性加热器的高性能 AZO/Ag/WO3 多层薄膜","authors":"Ke Zhu, Kaiwei Yang","doi":"10.1007/s00339-024-07993-8","DOIUrl":null,"url":null,"abstract":"<div><p>In this study, Al-doped ZnO/Ag/WO<sub>3</sub> (AZO/Ag/WO<sub>3</sub>)multilayer films were fabricated on polyethylene terephthalate (PET) substrates using the magnetron sputtering technique. A two-step magnetron sputtering process was employed to deposit WO<sub>3</sub>, effectively preventing insulation in the AZO/Ag/WO<sub>3</sub> multilayer film caused by silver oxidation. The optical properties of the AZO/Ag/WO<sub>3</sub> multilayer films can be adjusted by varying the thickness of AZO and WO<sub>3</sub> layers. The optimal AZO/Ag/WO<sub>3</sub> multilayer film demonstrates a maximum figure-of-merit of 1.74 × 10<sup>− 2</sup> Ω<sup>−1</sup>, with an average visible light transmittance of 81.1% and a sheet resistance of 7.04 Ω sq<sup>− 1</sup>. When applied in transparent flexible heaters, the AZO/Ag/WO<sub>3</sub> multilayer films exhibit rapid thermal response, stable and controllable heating performance at low operating voltage, indicating exceptional thermal properties and high conductivity. The two-step magnetron sputtering deposition of external oxide layers to prevent the oxidation of silver is cost-effective and can be utilized to create high-performance oxide/metal/oxide transparent electrodes.</p></div>","PeriodicalId":473,"journal":{"name":"Applied Physics A","volume":"130 11","pages":""},"PeriodicalIF":2.5000,"publicationDate":"2024-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Low-temperature fabrication of high-performance AZO/Ag/WO3 multilayer films for flexible heaters\",\"authors\":\"Ke Zhu, Kaiwei Yang\",\"doi\":\"10.1007/s00339-024-07993-8\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>In this study, Al-doped ZnO/Ag/WO<sub>3</sub> (AZO/Ag/WO<sub>3</sub>)multilayer films were fabricated on polyethylene terephthalate (PET) substrates using the magnetron sputtering technique. A two-step magnetron sputtering process was employed to deposit WO<sub>3</sub>, effectively preventing insulation in the AZO/Ag/WO<sub>3</sub> multilayer film caused by silver oxidation. The optical properties of the AZO/Ag/WO<sub>3</sub> multilayer films can be adjusted by varying the thickness of AZO and WO<sub>3</sub> layers. The optimal AZO/Ag/WO<sub>3</sub> multilayer film demonstrates a maximum figure-of-merit of 1.74 × 10<sup>− 2</sup> Ω<sup>−1</sup>, with an average visible light transmittance of 81.1% and a sheet resistance of 7.04 Ω sq<sup>− 1</sup>. When applied in transparent flexible heaters, the AZO/Ag/WO<sub>3</sub> multilayer films exhibit rapid thermal response, stable and controllable heating performance at low operating voltage, indicating exceptional thermal properties and high conductivity. The two-step magnetron sputtering deposition of external oxide layers to prevent the oxidation of silver is cost-effective and can be utilized to create high-performance oxide/metal/oxide transparent electrodes.</p></div>\",\"PeriodicalId\":473,\"journal\":{\"name\":\"Applied Physics A\",\"volume\":\"130 11\",\"pages\":\"\"},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2024-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Physics A\",\"FirstCategoryId\":\"4\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s00339-024-07993-8\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Physics A","FirstCategoryId":"4","ListUrlMain":"https://link.springer.com/article/10.1007/s00339-024-07993-8","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Low-temperature fabrication of high-performance AZO/Ag/WO3 multilayer films for flexible heaters
In this study, Al-doped ZnO/Ag/WO3 (AZO/Ag/WO3)multilayer films were fabricated on polyethylene terephthalate (PET) substrates using the magnetron sputtering technique. A two-step magnetron sputtering process was employed to deposit WO3, effectively preventing insulation in the AZO/Ag/WO3 multilayer film caused by silver oxidation. The optical properties of the AZO/Ag/WO3 multilayer films can be adjusted by varying the thickness of AZO and WO3 layers. The optimal AZO/Ag/WO3 multilayer film demonstrates a maximum figure-of-merit of 1.74 × 10− 2 Ω−1, with an average visible light transmittance of 81.1% and a sheet resistance of 7.04 Ω sq− 1. When applied in transparent flexible heaters, the AZO/Ag/WO3 multilayer films exhibit rapid thermal response, stable and controllable heating performance at low operating voltage, indicating exceptional thermal properties and high conductivity. The two-step magnetron sputtering deposition of external oxide layers to prevent the oxidation of silver is cost-effective and can be utilized to create high-performance oxide/metal/oxide transparent electrodes.
期刊介绍：
Applied Physics A publishes experimental and theoretical investigations in applied physics as regular articles, rapid communications, and invited papers. The distinguished 30-member Board of Editors reflects the interdisciplinary approach of the journal and ensures the highest quality of peer review.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
