硅晶片发射极片电阻测量的非接触式方法

IF 6.3 2区材料科学 Q2 ENERGY & FUELS

Solar Energy Materials and Solar Cells Pub Date : 2024-10-16 DOI:10.1016/j.solmat.2024.113209

Yan Zhu, Thorsten Trupke, Ziv Hameiri

{"title":"硅晶片发射极片电阻测量的非接触式方法","authors":"Yan Zhu, Thorsten Trupke, Ziv Hameiri","doi":"10.1016/j.solmat.2024.113209","DOIUrl":null,"url":null,"abstract":"<div><div>The emitter sheet resistance is an essential parameter impacting the efficiency of silicon solar cells with diffused layers. Conventional measurement methods of this parameter either require electrical contacts or are impacted by the bulk resistivity of the measured samples. In this study, a novel method based on the combination of eddy-current conductance and photoluminescence imaging is developed for a contactless determination of the emitter sheet resistance. Numerical simulation is used to establish the correlation between the photoluminescence profile and the sum of the emitter and bulk resistance. Together with eddy-current conductance measurements, the emitter sheet resistance and bulk resistance can be separated. The accuracy of the method is validated experimentally, and its uncertainty is investigated. The contactless nature of the developed method makes it attractive for inline inspection of diffused layers in solar cell manufacturing.</div></div>","PeriodicalId":429,"journal":{"name":"Solar Energy Materials and Solar Cells","volume":"278 ","pages":"Article 113209"},"PeriodicalIF":6.3000,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A contactless method of emitter sheet resistance measurement for silicon wafers\",\"authors\":\"Yan Zhu, Thorsten Trupke, Ziv Hameiri\",\"doi\":\"10.1016/j.solmat.2024.113209\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The emitter sheet resistance is an essential parameter impacting the efficiency of silicon solar cells with diffused layers. Conventional measurement methods of this parameter either require electrical contacts or are impacted by the bulk resistivity of the measured samples. In this study, a novel method based on the combination of eddy-current conductance and photoluminescence imaging is developed for a contactless determination of the emitter sheet resistance. Numerical simulation is used to establish the correlation between the photoluminescence profile and the sum of the emitter and bulk resistance. Together with eddy-current conductance measurements, the emitter sheet resistance and bulk resistance can be separated. The accuracy of the method is validated experimentally, and its uncertainty is investigated. The contactless nature of the developed method makes it attractive for inline inspection of diffused layers in solar cell manufacturing.</div></div>\",\"PeriodicalId\":429,\"journal\":{\"name\":\"Solar Energy Materials and Solar Cells\",\"volume\":\"278 \",\"pages\":\"Article 113209\"},\"PeriodicalIF\":6.3000,\"publicationDate\":\"2024-10-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Solar Energy Materials and Solar Cells\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S092702482400521X\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENERGY & FUELS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Solar Energy Materials and Solar Cells","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S092702482400521X","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENERGY & FUELS","Score":null,"Total":0}

引用次数: 0

摘要

发射极片电阻是影响扩散层硅太阳能电池效率的重要参数。该参数的传统测量方法要么需要电接触，要么会受到被测样品体电阻率的影响。本研究开发了一种基于涡流电导和光致发光成像相结合的新方法，用于非接触式测定发射极片电阻。利用数值模拟建立了光致发光轮廓与发射极和体电阻之和之间的相关性。结合涡流电导测量，可以将发射极片电阻和体电阻分开。实验验证了该方法的准确性，并对其不确定性进行了研究。所开发方法的非接触特性使其对太阳能电池制造中扩散层的在线检测具有吸引力。

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A contactless method of emitter sheet resistance measurement for silicon wafers

The emitter sheet resistance is an essential parameter impacting the efficiency of silicon solar cells with diffused layers. Conventional measurement methods of this parameter either require electrical contacts or are impacted by the bulk resistivity of the measured samples. In this study, a novel method based on the combination of eddy-current conductance and photoluminescence imaging is developed for a contactless determination of the emitter sheet resistance. Numerical simulation is used to establish the correlation between the photoluminescence profile and the sum of the emitter and bulk resistance. Together with eddy-current conductance measurements, the emitter sheet resistance and bulk resistance can be separated. The accuracy of the method is validated experimentally, and its uncertainty is investigated. The contactless nature of the developed method makes it attractive for inline inspection of diffused layers in solar cell manufacturing.

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来源期刊

Solar Energy Materials and Solar Cells 工程技术-材料科学：综合

CiteScore

12.60

自引率

11.60%

发文量

513

审稿时长

47 days

期刊介绍： Solar Energy Materials & Solar Cells is intended as a vehicle for the dissemination of research results on materials science and technology related to photovoltaic, photothermal and photoelectrochemical solar energy conversion. Materials science is taken in the broadest possible sense and encompasses physics, chemistry, optics, materials fabrication and analysis for all types of materials.