{"title":"厚度调节对 TiN/(CrVTaTiW)Nx 多层涂层机械性能的影响","authors":"Yuchun Tu, Junjie Li, Yanyan Yuan, JiaoLing Zhao, Azfar Hameed, Chao Yan, Hui Chen, Rui Lan, Benyuan Cheng, Peipei Wang, Wei Wang, Xiuguang Huang","doi":"10.1016/j.ceramint.2024.10.150","DOIUrl":null,"url":null,"abstract":"A novel TiN/(CrVTaTiW)N<sub><em>x</em></sub> multilayer coating, consisting of the high-entropy alloy nitride and the binary nitride was prepared by DC magnetron sputtering. Detailed investigation about the microstructure and mechanical attributes of the multilayer films was conducted, with particular emphasis on the influence of high entropy nitride (HEN) modulation layer’s thickness. The results reveal that all samples exhibited a face-centred cubic (fcc) crystal structure with a (111) preferred orientation. Notably, the hardness and elastic modulus of multilayer films increase with increase of the HEN layer’s thickness. When the thickness of the HEN layer reached 4.8 nm, the hardness and elastic modulus of the TiN/(CrVTaTiW)N<sub><em>x</em></sub> multilayer reached the maximum values of 25.33 GPa and 311.95 GPa, respectively. These results indicate the key role of the HEN layer as a modulation layer within the coating, ultimately demonstrating the importance of thickness on the structure and properties of TiN/(CrVTaTiW)N<sub><em>x</em></sub> nanomultilayer films.","PeriodicalId":48790,"journal":{"name":"The Lancet Diabetes & Endocrinology","volume":"229 1","pages":""},"PeriodicalIF":44.0000,"publicationDate":"2024-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Thickness modulation influenced mechanical properties of TiN/(CrVTaTiW)Nx multilayer coatings\",\"authors\":\"Yuchun Tu, Junjie Li, Yanyan Yuan, JiaoLing Zhao, Azfar Hameed, Chao Yan, Hui Chen, Rui Lan, Benyuan Cheng, Peipei Wang, Wei Wang, Xiuguang Huang\",\"doi\":\"10.1016/j.ceramint.2024.10.150\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel TiN/(CrVTaTiW)N<sub><em>x</em></sub> multilayer coating, consisting of the high-entropy alloy nitride and the binary nitride was prepared by DC magnetron sputtering. Detailed investigation about the microstructure and mechanical attributes of the multilayer films was conducted, with particular emphasis on the influence of high entropy nitride (HEN) modulation layer’s thickness. The results reveal that all samples exhibited a face-centred cubic (fcc) crystal structure with a (111) preferred orientation. Notably, the hardness and elastic modulus of multilayer films increase with increase of the HEN layer’s thickness. When the thickness of the HEN layer reached 4.8 nm, the hardness and elastic modulus of the TiN/(CrVTaTiW)N<sub><em>x</em></sub> multilayer reached the maximum values of 25.33 GPa and 311.95 GPa, respectively. These results indicate the key role of the HEN layer as a modulation layer within the coating, ultimately demonstrating the importance of thickness on the structure and properties of TiN/(CrVTaTiW)N<sub><em>x</em></sub> nanomultilayer films.\",\"PeriodicalId\":48790,\"journal\":{\"name\":\"The Lancet Diabetes & Endocrinology\",\"volume\":\"229 1\",\"pages\":\"\"},\"PeriodicalIF\":44.0000,\"publicationDate\":\"2024-10-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The Lancet Diabetes & Endocrinology\",\"FirstCategoryId\":\"3\",\"ListUrlMain\":\"https://doi.org/10.1016/j.ceramint.2024.10.150\",\"RegionNum\":1,\"RegionCategory\":\"医学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENDOCRINOLOGY & METABOLISM\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Lancet Diabetes & Endocrinology","FirstCategoryId":"3","ListUrlMain":"https://doi.org/10.1016/j.ceramint.2024.10.150","RegionNum":1,"RegionCategory":"医学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENDOCRINOLOGY & METABOLISM","Score":null,"Total":0}
引用次数: 0
摘要
通过直流磁控溅射制备了一种新型 TiN/(CrVTaTiW)Nx 多层涂层,该涂层由高熵合金氮化物和二元氮化物组成。研究人员对多层薄膜的微观结构和机械属性进行了详细调查,并特别强调了高熵氮化物(HEN)调制层厚度的影响。结果表明,所有样品都呈现出以 (111) 为优先取向的面心立方(fcc)晶体结构。值得注意的是,多层薄膜的硬度和弹性模量随着 HEN 层厚度的增加而增加。当 HEN 层的厚度达到 4.8 nm 时,TiN/(CrVTaTiW)Nx 多层膜的硬度和弹性模量分别达到 25.33 GPa 和 311.95 GPa 的最大值。这些结果表明了 HEN 层作为涂层内的调制层所发挥的关键作用,最终证明了厚度对 TiN/(CrVTaTiW)Nx 纳米多层膜的结构和性能的重要性。
Thickness modulation influenced mechanical properties of TiN/(CrVTaTiW)Nx multilayer coatings
A novel TiN/(CrVTaTiW)Nx multilayer coating, consisting of the high-entropy alloy nitride and the binary nitride was prepared by DC magnetron sputtering. Detailed investigation about the microstructure and mechanical attributes of the multilayer films was conducted, with particular emphasis on the influence of high entropy nitride (HEN) modulation layer’s thickness. The results reveal that all samples exhibited a face-centred cubic (fcc) crystal structure with a (111) preferred orientation. Notably, the hardness and elastic modulus of multilayer films increase with increase of the HEN layer’s thickness. When the thickness of the HEN layer reached 4.8 nm, the hardness and elastic modulus of the TiN/(CrVTaTiW)Nx multilayer reached the maximum values of 25.33 GPa and 311.95 GPa, respectively. These results indicate the key role of the HEN layer as a modulation layer within the coating, ultimately demonstrating the importance of thickness on the structure and properties of TiN/(CrVTaTiW)Nx nanomultilayer films.
期刊介绍:
The Lancet Diabetes & Endocrinology, an independent journal with a global perspective and strong clinical focus, features original clinical research, expert reviews, news, and opinion pieces in each monthly issue. Covering topics like diabetes, obesity, nutrition, and more, the journal provides insights into clinical advances and practice-changing research worldwide. It welcomes original research advocating change or shedding light on clinical practice, as well as informative reviews on related topics, especially those with global health importance and relevance to low-income and middle-income countries. The journal publishes various content types, including Articles, Reviews, Comments, Correspondence, Health Policy, and Personal Views, along with Series and Commissions aiming to drive positive change in clinical practice and health policy in diabetes and endocrinology.