{"title":"研究 I.H.P. 结构的温度特性及其在表面声波滤波器中的应用","authors":"A. S. Koigerov, O. L. Balysheva","doi":"10.1134/S1063774524601461","DOIUrl":null,"url":null,"abstract":"<p>The temperature properties of the incredible high performance (I.H.P.) structures on a multilayer lithium tantalate/silicon dioxide film/silicon substrate have been studied; these structures are used to improve the characteristics of devices on surface acoustic waves. Test structures have been simulated by the finite-element method in the COMSOL software and the temperature coefficient of frequency has been calculated. The calculated transfer coefficients of a resonator filter on a conventional single-crystal 36°<i>YX</i>-cut lithium tantalate substrate and an I.H.P. filter are compared at different temperatures. It is shown that the temperature coefficient of frequency can be minimized by fitting the thicknesses of the substrate layers. A comparison shows that the results obtained are in good agreement with the known data. The practical importance is that the simulation results and calculated parameters can be used for designing devices of different classes based on multilayer substrates (including those with I.H.P. structures).</p>","PeriodicalId":527,"journal":{"name":"Crystallography Reports","volume":"69 4","pages":"530 - 535"},"PeriodicalIF":0.6000,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation of the Temperature Properties of the I.H.P. Structure and Its Application for Filters on Surface Acoustic Waves\",\"authors\":\"A. S. Koigerov, O. L. Balysheva\",\"doi\":\"10.1134/S1063774524601461\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The temperature properties of the incredible high performance (I.H.P.) structures on a multilayer lithium tantalate/silicon dioxide film/silicon substrate have been studied; these structures are used to improve the characteristics of devices on surface acoustic waves. Test structures have been simulated by the finite-element method in the COMSOL software and the temperature coefficient of frequency has been calculated. The calculated transfer coefficients of a resonator filter on a conventional single-crystal 36°<i>YX</i>-cut lithium tantalate substrate and an I.H.P. filter are compared at different temperatures. It is shown that the temperature coefficient of frequency can be minimized by fitting the thicknesses of the substrate layers. A comparison shows that the results obtained are in good agreement with the known data. The practical importance is that the simulation results and calculated parameters can be used for designing devices of different classes based on multilayer substrates (including those with I.H.P. structures).</p>\",\"PeriodicalId\":527,\"journal\":{\"name\":\"Crystallography Reports\",\"volume\":\"69 4\",\"pages\":\"530 - 535\"},\"PeriodicalIF\":0.6000,\"publicationDate\":\"2024-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Crystallography Reports\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1063774524601461\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"CRYSTALLOGRAPHY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Crystallography Reports","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1134/S1063774524601461","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CRYSTALLOGRAPHY","Score":null,"Total":0}
Investigation of the Temperature Properties of the I.H.P. Structure and Its Application for Filters on Surface Acoustic Waves
The temperature properties of the incredible high performance (I.H.P.) structures on a multilayer lithium tantalate/silicon dioxide film/silicon substrate have been studied; these structures are used to improve the characteristics of devices on surface acoustic waves. Test structures have been simulated by the finite-element method in the COMSOL software and the temperature coefficient of frequency has been calculated. The calculated transfer coefficients of a resonator filter on a conventional single-crystal 36°YX-cut lithium tantalate substrate and an I.H.P. filter are compared at different temperatures. It is shown that the temperature coefficient of frequency can be minimized by fitting the thicknesses of the substrate layers. A comparison shows that the results obtained are in good agreement with the known data. The practical importance is that the simulation results and calculated parameters can be used for designing devices of different classes based on multilayer substrates (including those with I.H.P. structures).
期刊介绍：
Crystallography Reports is a journal that publishes original articles short communications, and reviews on various aspects of crystallography: diffraction and scattering of X-rays, electrons, and neutrons, determination of crystal structure of inorganic and organic substances, including proteins and other biological substances; UV-VIS and IR spectroscopy; growth, imperfect structure and physical properties of crystals; thin films, liquid crystals, nanomaterials, partially disordered systems, and the methods of studies.
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