Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun
{"title":"基于嵌入式微通道体声波谐振器的超灵敏液体传感器。","authors":"Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun","doi":"10.1038/s41378-024-00790-6","DOIUrl":null,"url":null,"abstract":"<p><p>The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies. In this work, a fluidic sensor based on a BAW resonator structure is fabricated and investigated. Embedded microchannels are formed beneath the active area of the BAW device without the need for external processes. As liquid flows through the microchannel, pressure is exerted on the upper wall (piezoelectric film) of the microchannel, which causes a shift in the resonant frequency. Using density functional theory, we revealed the intrinsic mechanism by which piezoelectric film deformation influences BAW resonator performance. Theoretically, the upwardly convex piezoelectric film caused by liquid flow can increase the resonant frequency. The experimental results obtained with ethanol solutions of different concentrations reveal that the sensor, which operates at a high resonant frequency of 2.225 GHz, achieves a remarkable sensitivity of 5.1 MHz/% (221 ppm/%), with an ultrahigh linearity of 0.995. This study reveals the intrinsic mechanism of liquid sensing based on BAW resonators, highlights the potential of AlN/Al<sub>0.8</sub>Sc<sub>0.2</sub>N composite film BAW resonators in liquid sensing applications and offers insights for future research and development in this field.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"143"},"PeriodicalIF":7.3000,"publicationDate":"2024-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11467206/pdf/","citationCount":"0","resultStr":"{\"title\":\"Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.\",\"authors\":\"Xiyu Gu, Yan Liu, Yuanhang Qu, Xiang Chen, Zesheng Liu, Yao Cai, Wenjuan Liu, Shishang Guo, Chengliang Sun\",\"doi\":\"10.1038/s41378-024-00790-6\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies. In this work, a fluidic sensor based on a BAW resonator structure is fabricated and investigated. Embedded microchannels are formed beneath the active area of the BAW device without the need for external processes. As liquid flows through the microchannel, pressure is exerted on the upper wall (piezoelectric film) of the microchannel, which causes a shift in the resonant frequency. Using density functional theory, we revealed the intrinsic mechanism by which piezoelectric film deformation influences BAW resonator performance. Theoretically, the upwardly convex piezoelectric film caused by liquid flow can increase the resonant frequency. The experimental results obtained with ethanol solutions of different concentrations reveal that the sensor, which operates at a high resonant frequency of 2.225 GHz, achieves a remarkable sensitivity of 5.1 MHz/% (221 ppm/%), with an ultrahigh linearity of 0.995. This study reveals the intrinsic mechanism of liquid sensing based on BAW resonators, highlights the potential of AlN/Al<sub>0.8</sub>Sc<sub>0.2</sub>N composite film BAW resonators in liquid sensing applications and offers insights for future research and development in this field.</p>\",\"PeriodicalId\":18560,\"journal\":{\"name\":\"Microsystems & Nanoengineering\",\"volume\":\"10 1\",\"pages\":\"143\"},\"PeriodicalIF\":7.3000,\"publicationDate\":\"2024-10-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11467206/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Microsystems & Nanoengineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1038/s41378-024-00790-6\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-024-00790-6","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator.
The high-frequency and high-quality factor characteristics of bulk acoustic wave (BAW) resonators have significantly advanced their application in sensing technologies. In this work, a fluidic sensor based on a BAW resonator structure is fabricated and investigated. Embedded microchannels are formed beneath the active area of the BAW device without the need for external processes. As liquid flows through the microchannel, pressure is exerted on the upper wall (piezoelectric film) of the microchannel, which causes a shift in the resonant frequency. Using density functional theory, we revealed the intrinsic mechanism by which piezoelectric film deformation influences BAW resonator performance. Theoretically, the upwardly convex piezoelectric film caused by liquid flow can increase the resonant frequency. The experimental results obtained with ethanol solutions of different concentrations reveal that the sensor, which operates at a high resonant frequency of 2.225 GHz, achieves a remarkable sensitivity of 5.1 MHz/% (221 ppm/%), with an ultrahigh linearity of 0.995. This study reveals the intrinsic mechanism of liquid sensing based on BAW resonators, highlights the potential of AlN/Al0.8Sc0.2N composite film BAW resonators in liquid sensing applications and offers insights for future research and development in this field.
期刊介绍：
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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