利用界面层效应研究 TiN/Hf0.5Zr0.5O2/WOx/W 铁电隧道结中的铁阻开关机制

IF 11.9 1区物理与天体物理 Q1 PHYSICS, APPLIED

Applied physics reviews Pub Date : 2024-10-08 DOI:10.1063/5.0224203

Suk Hyun Lee, Han Sol Park, Seong Jae Shin, In Soo Lee, Seung Kyu Ryoo, Seungyong Byun, Kyung Do Kim, Taehwan Moon, Cheol Seong Hwang

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引用次数: 0

摘要

本研究深入分析了 TiN/Hf0.5Zr0.5O2(HZO)/WOx/W 铁电隧道结 (FTJ) 器件中的铁阻开关 (FRS) 行为，尤其关注氧化钨 (WOx) 接口层 (IL) 的作用。结构检查证实了 WOx IL 的存在，它极大地影响了器件的铁电隧道结特性。电学测量表明，该器件具有稳定、可重复的 FRS 特性，导通/关断比为 9.7，这主要归因于铁电极化驱动的隧穿电阻 (TER) 效应。综合数值模拟结合了成核限制开关模型和西蒙斯隧道机制，详细揭示了 WOx IL 和 HZO/WOx 界面的俘获电荷如何影响极化开关机制和电子势垒曲线。这些发现强调了界面效应在基于 HfO2 的 FTJ 中的重要性，并推进了对多层铁电系统中 TER 机制的理解。

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Investigation of ferro-resistive switching mechanisms in TiN/Hf0.5Zr0.5O2/WOx/W ferroelectric tunnel junctions with the interface layer effect

This study presents an in-depth analysis of ferro-resistive switching (FRS) behaviors in a TiN/Hf0.5Zr0.5O2(HZO)/WOx/W ferroelectric tunnel junction (FTJ) device, with a particular focus on the role of the tungsten oxide (WOx) interface layer (IL). Structural examinations confirm the presence of the WOx IL, which significantly influences the FRS properties of the device. Electrical measurements indicate the devices exhibit stable and reproducible FRS characteristics with an ON/OFF ratio of 9.7, predominantly attributed to the tunneling electro-resistance (TER) effect driven by the ferroelectric polarization. Comprehensive numerical simulations, incorporating the nucleation-limited switching model and Simmons tunneling mechanism, provide detailed insights into how the WOx IL and the trapped charges at the HZO/WOx interface affect polarization switching mechanisms and the electronic potential barrier profile. These findings underscore the importance of interface effects in HfO2-based FTJs and advance the understanding of the TER mechanism in multilayer ferroelectric systems.

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来源期刊

Applied physics reviews PHYSICS, APPLIED-

CiteScore

22.50

自引率

2.00%

发文量

113

审稿时长

2 months

期刊介绍： Applied Physics Reviews (APR) is a journal featuring articles on critical topics in experimental or theoretical research in applied physics and applications of physics to other scientific and engineering branches. The publication includes two main types of articles: Original Research: These articles report on high-quality, novel research studies that are of significant interest to the applied physics community. Reviews: Review articles in APR can either be authoritative and comprehensive assessments of established areas of applied physics or short, timely reviews of recent advances in established fields or emerging areas of applied physics.