{"title":"仿生接触行为启发的触觉传感阵列,采用可编程的微穹顶模式,制造工艺可扩展且一致。","authors":"Xiaoliang Chen, Yizhuo Luo, Yun Chen, Sheng Li, Shizheng Deng, Bin Wang, Qi Zhang, Xiangmeng Li, Xiangming Li, Chunhui Wang, Juan He, Hongmiao Tian, Jinyou Shao","doi":"10.1002/advs.202408082","DOIUrl":null,"url":null,"abstract":"<p><p>Flexible sensor arrays have attracted extensive attention in human-computer interaction. However, realizing high-performance sensor units with programmable properties, and expanding them to multi-pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure-based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi-pixel sensor array at the wafer level with high consistency through scalable and high-precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti-crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high-precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications.</p>","PeriodicalId":117,"journal":{"name":"Advanced Science","volume":null,"pages":null},"PeriodicalIF":14.3000,"publicationDate":"2024-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication.\",\"authors\":\"Xiaoliang Chen, Yizhuo Luo, Yun Chen, Sheng Li, Shizheng Deng, Bin Wang, Qi Zhang, Xiangmeng Li, Xiangming Li, Chunhui Wang, Juan He, Hongmiao Tian, Jinyou Shao\",\"doi\":\"10.1002/advs.202408082\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Flexible sensor arrays have attracted extensive attention in human-computer interaction. However, realizing high-performance sensor units with programmable properties, and expanding them to multi-pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure-based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi-pixel sensor array at the wafer level with high consistency through scalable and high-precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti-crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high-precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications.</p>\",\"PeriodicalId\":117,\"journal\":{\"name\":\"Advanced Science\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":14.3000,\"publicationDate\":\"2024-09-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced Science\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1002/advs.202408082\",\"RegionNum\":1,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Science","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1002/advs.202408082","RegionNum":1,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication.
Flexible sensor arrays have attracted extensive attention in human-computer interaction. However, realizing high-performance sensor units with programmable properties, and expanding them to multi-pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure-based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi-pixel sensor array at the wafer level with high consistency through scalable and high-precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti-crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high-precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications.
期刊介绍:
Advanced Science is a prestigious open access journal that focuses on interdisciplinary research in materials science, physics, chemistry, medical and life sciences, and engineering. The journal aims to promote cutting-edge research by employing a rigorous and impartial review process. It is committed to presenting research articles with the highest quality production standards, ensuring maximum accessibility of top scientific findings. With its vibrant and innovative publication platform, Advanced Science seeks to revolutionize the dissemination and organization of scientific knowledge.