{"title":"利用相控阵 MEMS 可调光栅耦合器实现二维光束转向","authors":"Jishnu K.N. , Viswas Sadasivan","doi":"10.1016/j.sna.2024.115915","DOIUrl":null,"url":null,"abstract":"<div><div>This paper describes a two-dimensional (2D) optical beam steering system using a one-dimensional (1D) optical phased array of 1D micro-electromechanical systems (MEMS) tunable grating couplers. Tuning the incremental phase difference β between the elements of an optical phased array is used to steer the beam in one direction (say, transverse). At the same time, the MEMS tuning of the individual grating couplers steers the beam in the perpendicular direction (longitudinal). A beam steering of ∼35° could be demonstrated along the transverse direction by varying <em>β</em> from −70° to 70°. The beam steering was ∼19° along the longitudinal direction by applying a potential difference of ∼ 1.6 volts to the MEMS tunable grating couplers. The beam width of the device with a mechanically and optically designed aperture of 100 μm × 100 μm is ∼ 1.75° × 0.82°. The beam width further reduces to ∼ 0.15° × 0.5° when the aperture increases to 1 mm × 0.2 mm. The 100 μm × 100 μm aperture supports a beam steering frequency of up to ∼ 50 kHz, comparable to the available state-of-the-art devices using other technologies like wavelength tuning (WT) and 2D phased arrays. The maximum voltage required by this MEMS is only around 1.6 volts, resulting in simple circuitry and low power consumption.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"379 ","pages":"Article 115915"},"PeriodicalIF":4.1000,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"2D beam steering using phased array of MEMS tunable grating couplers\",\"authors\":\"Jishnu K.N. , Viswas Sadasivan\",\"doi\":\"10.1016/j.sna.2024.115915\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This paper describes a two-dimensional (2D) optical beam steering system using a one-dimensional (1D) optical phased array of 1D micro-electromechanical systems (MEMS) tunable grating couplers. Tuning the incremental phase difference β between the elements of an optical phased array is used to steer the beam in one direction (say, transverse). At the same time, the MEMS tuning of the individual grating couplers steers the beam in the perpendicular direction (longitudinal). A beam steering of ∼35° could be demonstrated along the transverse direction by varying <em>β</em> from −70° to 70°. The beam steering was ∼19° along the longitudinal direction by applying a potential difference of ∼ 1.6 volts to the MEMS tunable grating couplers. The beam width of the device with a mechanically and optically designed aperture of 100 μm × 100 μm is ∼ 1.75° × 0.82°. The beam width further reduces to ∼ 0.15° × 0.5° when the aperture increases to 1 mm × 0.2 mm. The 100 μm × 100 μm aperture supports a beam steering frequency of up to ∼ 50 kHz, comparable to the available state-of-the-art devices using other technologies like wavelength tuning (WT) and 2D phased arrays. The maximum voltage required by this MEMS is only around 1.6 volts, resulting in simple circuitry and low power consumption.</div></div>\",\"PeriodicalId\":21689,\"journal\":{\"name\":\"Sensors and Actuators A-physical\",\"volume\":\"379 \",\"pages\":\"Article 115915\"},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2024-09-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Sensors and Actuators A-physical\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0924424724009099\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424724009099","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
2D beam steering using phased array of MEMS tunable grating couplers
This paper describes a two-dimensional (2D) optical beam steering system using a one-dimensional (1D) optical phased array of 1D micro-electromechanical systems (MEMS) tunable grating couplers. Tuning the incremental phase difference β between the elements of an optical phased array is used to steer the beam in one direction (say, transverse). At the same time, the MEMS tuning of the individual grating couplers steers the beam in the perpendicular direction (longitudinal). A beam steering of ∼35° could be demonstrated along the transverse direction by varying β from −70° to 70°. The beam steering was ∼19° along the longitudinal direction by applying a potential difference of ∼ 1.6 volts to the MEMS tunable grating couplers. The beam width of the device with a mechanically and optically designed aperture of 100 μm × 100 μm is ∼ 1.75° × 0.82°. The beam width further reduces to ∼ 0.15° × 0.5° when the aperture increases to 1 mm × 0.2 mm. The 100 μm × 100 μm aperture supports a beam steering frequency of up to ∼ 50 kHz, comparable to the available state-of-the-art devices using other technologies like wavelength tuning (WT) and 2D phased arrays. The maximum voltage required by this MEMS is only around 1.6 volts, resulting in simple circuitry and low power consumption.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...