{"title":"利用直流溅射技术模拟和沉积氧化钨 (WO3) 薄膜,实现紫外光光电探测器的高响应度","authors":"","doi":"10.1016/j.physb.2024.416555","DOIUrl":null,"url":null,"abstract":"<div><div>Tungsten trioxide (WO<sub>3</sub>) detects UV radiation with great sensitivity while disregarding visible light, and it also has excellent electron mobility, allowing for efficient charge transport and fast response times. This work aims to develop a highly sensitive UV photodetector using WO<sub>3</sub> material by optimizing the deposition parameter partial oxygen pressure (PaO<sub>2</sub>) and annealing the samples at various temperatures to determine the best PaO<sub>2</sub> and annealing temperature that results in an improvement in the UV photodetector's sensitivity. The material WO<sub>3</sub> was coated on glass substrates using DC magnetron sputtering while altering the PaO<sub>2</sub> as 6 × 10<sup>−2</sup> Pa, 4 × 10<sup>−2</sup> -2 Pa, and 2 × 10<sup>−2</sup> Pa, and then each as-deposited sample from varied PaO<sub>2</sub> was annealed at temperatures ranging from 100°C to 400°C. When the sample's responses were compared, it was observed that the sample deposited at PaO<sub>2</sub> 2 × 10<sup>−2</sup> Pa and annealed at 400 °C exhibited good photodetection capabilities, as evidenced by several characterization techniques such as SEM, XRD, and IV characterization. The work was subsequently carried out by evaluating the sample deposited at PaO<sub>2</sub> 2 × 10<sup>−2</sup> Pa and annealed at 700 °C, which produced a good result for UV photodetection with the device's responsivity of 1e+4 A/W.</div></div>","PeriodicalId":20116,"journal":{"name":"Physica B-condensed Matter","volume":null,"pages":null},"PeriodicalIF":2.8000,"publicationDate":"2024-09-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simulation and deposition of Tungsten oxide (WO3) films using DC sputtering towards UV photodetector for high responsivity\",\"authors\":\"\",\"doi\":\"10.1016/j.physb.2024.416555\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Tungsten trioxide (WO<sub>3</sub>) detects UV radiation with great sensitivity while disregarding visible light, and it also has excellent electron mobility, allowing for efficient charge transport and fast response times. This work aims to develop a highly sensitive UV photodetector using WO<sub>3</sub> material by optimizing the deposition parameter partial oxygen pressure (PaO<sub>2</sub>) and annealing the samples at various temperatures to determine the best PaO<sub>2</sub> and annealing temperature that results in an improvement in the UV photodetector's sensitivity. The material WO<sub>3</sub> was coated on glass substrates using DC magnetron sputtering while altering the PaO<sub>2</sub> as 6 × 10<sup>−2</sup> Pa, 4 × 10<sup>−2</sup> -2 Pa, and 2 × 10<sup>−2</sup> Pa, and then each as-deposited sample from varied PaO<sub>2</sub> was annealed at temperatures ranging from 100°C to 400°C. When the sample's responses were compared, it was observed that the sample deposited at PaO<sub>2</sub> 2 × 10<sup>−2</sup> Pa and annealed at 400 °C exhibited good photodetection capabilities, as evidenced by several characterization techniques such as SEM, XRD, and IV characterization. The work was subsequently carried out by evaluating the sample deposited at PaO<sub>2</sub> 2 × 10<sup>−2</sup> Pa and annealed at 700 °C, which produced a good result for UV photodetection with the device's responsivity of 1e+4 A/W.</div></div>\",\"PeriodicalId\":20116,\"journal\":{\"name\":\"Physica B-condensed Matter\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.8000,\"publicationDate\":\"2024-09-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physica B-condensed Matter\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0921452624008962\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physica B-condensed Matter","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0921452624008962","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Simulation and deposition of Tungsten oxide (WO3) films using DC sputtering towards UV photodetector for high responsivity
Tungsten trioxide (WO3) detects UV radiation with great sensitivity while disregarding visible light, and it also has excellent electron mobility, allowing for efficient charge transport and fast response times. This work aims to develop a highly sensitive UV photodetector using WO3 material by optimizing the deposition parameter partial oxygen pressure (PaO2) and annealing the samples at various temperatures to determine the best PaO2 and annealing temperature that results in an improvement in the UV photodetector's sensitivity. The material WO3 was coated on glass substrates using DC magnetron sputtering while altering the PaO2 as 6 × 10−2 Pa, 4 × 10−2 -2 Pa, and 2 × 10−2 Pa, and then each as-deposited sample from varied PaO2 was annealed at temperatures ranging from 100°C to 400°C. When the sample's responses were compared, it was observed that the sample deposited at PaO2 2 × 10−2 Pa and annealed at 400 °C exhibited good photodetection capabilities, as evidenced by several characterization techniques such as SEM, XRD, and IV characterization. The work was subsequently carried out by evaluating the sample deposited at PaO2 2 × 10−2 Pa and annealed at 700 °C, which produced a good result for UV photodetection with the device's responsivity of 1e+4 A/W.
期刊介绍:
Physica B: Condensed Matter comprises all condensed matter and material physics that involve theoretical, computational and experimental work.
Papers should contain further developments and a proper discussion on the physics of experimental or theoretical results in one of the following areas:
-Magnetism
-Materials physics
-Nanostructures and nanomaterials
-Optics and optical materials
-Quantum materials
-Semiconductors
-Strongly correlated systems
-Superconductivity
-Surfaces and interfaces