Shunda Zhang, Tian-Yu Sun, Zhen Wang, Ruyi Zhang, Yu Lin, Shaozhu Xiao, Guanhua Su, Jiachang Bi, Peiyi Li, Hongliang Zhang, Lingyan Liang, Fang Yang, Qinghua Zhang, Liang-Feng Huang, Yanwei Cao
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引用次数: 0
摘要
引入氮空位已被证明是调整难熔氮化钛等离子特性的有效方法。然而,由于缺乏高质量的单晶样品和对电子特性的深入了解,其基本机制仍存在争议。在此,我们合成了一系列氮空位浓度不同的氮化钛外延薄膜(TiNx)。光谱椭偏仪测量结果表明,等离子体能量可从化学计量氮化钛的 2.64 eV 调整到亚化学计量氮化钛的 3.38 eV。我们对电学和等离子特性的综合分析表明,费米级附近电子状态的增加和电子带结构的改变导致载流子有效质量的降低是调整 TiNx 等离子特性的原因。我们的研究结果加深了对 TiNx 外延薄膜可调等离子特性的理解,有利于氮化物等离子器件的开发。
Engineering Carrier Density and Effective Mass of Plasmonic TiN Films by Tailoring Nitrogen Vacancies.
The introduction of nitrogen vacancies has been shown to be an effective way to tune the plasmonic properties of refractory titanium nitrides. However, its underlying mechanism remains debated due to the lack of high-quality single-crystalline samples and a deep understanding of electronic properties. Here, a series of epitaxial titanium nitride films with varying nitrogen vacancy concentrations (TiNx) were synthesized. Spectroscopic ellipsometry measurements revealed that the plasmon energy could be tuned from 2.64 eV in stoichiometric TiN to 3.38 eV in substoichiometric TiNx. Our comprehensive analysis of electrical and plasmonic properties showed that both the increased electronic states around the Fermi level and the decreased carrier effective mass due to the modified electronic band structures are responsible for tuning the plasmonic properties of TiNx. Our findings offer a deeper understanding of the tunable plasmonic properties in epitaxial TiNx films and are beneficial for the development of nitride plasmonic devices.
期刊介绍:
Nano Letters serves as a dynamic platform for promptly disseminating original results in fundamental, applied, and emerging research across all facets of nanoscience and nanotechnology. A pivotal criterion for inclusion within Nano Letters is the convergence of at least two different areas or disciplines, ensuring a rich interdisciplinary scope. The journal is dedicated to fostering exploration in diverse areas, including:
- Experimental and theoretical findings on physical, chemical, and biological phenomena at the nanoscale
- Synthesis, characterization, and processing of organic, inorganic, polymer, and hybrid nanomaterials through physical, chemical, and biological methodologies
- Modeling and simulation of synthetic, assembly, and interaction processes
- Realization of integrated nanostructures and nano-engineered devices exhibiting advanced performance
- Applications of nanoscale materials in living and environmental systems
Nano Letters is committed to advancing and showcasing groundbreaking research that intersects various domains, fostering innovation and collaboration in the ever-evolving field of nanoscience and nanotechnology.