在原生氮化镓衬底上通过 HVPE 生长的氮化镓基垂直氮化镓 SBD 中的泄漏电流

IF 1.4 4区物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY

AIP Advances Pub Date : 2024-09-17 DOI:10.1063/5.0208706

Weiyi Jin, Yumin Zhang, Songyuan Xia, Qizhi Zhu, Yuanhang Sun, Juemin Yi, Jianfeng Wang, Ke Xu

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引用次数: 0

摘要

本研究调查了垂直氮化镓-氮化镓肖特基势垒二极管（SBD）的漏电机制，并展示了有效的缓解策略。所制备的器件具有较低的反向漏电流（-200 V 时为 1 × 10-5 A/cm2 ）和较高的离子/关断比（∼1010），其性能超过了国外衬底上的 GaN SBD。我们阐明了主要的漏电机制--热离子发射、普尔-弗伦克尔发射和变程跳变--及其随温度和偏压的演变。优化的制造工艺（包括缺陷蚀刻和新型双层钝化技术）使漏电流降低了 1000 多倍。

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Leakage current in GaN-on-GaN vertical GaN SBDs grown by HVPE on native GaN substrates

This study investigates leakage mechanisms in vertical GaN-on-GaN Schottky barrier diodes (SBDs) and demonstrates effective mitigation strategies. The fabricated devices exhibit low reverse leakage current (1 × 10−5 A/cm2 at −200 V) and a high Ion/Ioff ratio (∼1010), surpassing the performance of GaN SBDs on foreign substrates. We elucidate dominant leakage mechanisms—thermionic emission, Poole–Frenkel emission, and variable-range hopping—and their evolution with temperature and bias. Optimized fabrication processes, including defect etching and a novel dual-layer passivation technique, achieve over a 1000-fold reduction in leakage current.

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来源期刊

AIP Advances NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

2.80

自引率

6.20%

发文量

1233

审稿时长

2-4 weeks

期刊介绍： AIP Advances is an open access journal publishing in all areas of physical sciences—applied, theoretical, and experimental. All published articles are freely available to read, download, and share. The journal prides itself on the belief that all good science is important and relevant. Our inclusive scope and publication standards make it an essential outlet for scientists in the physical sciences. AIP Advances is a community-based journal, with a fast production cycle. The quick publication process and open-access model allows us to quickly distribute new scientific concepts. Our Editors, assisted by peer review, determine whether a manuscript is technically correct and original. After publication, the readership evaluates whether a manuscript is timely, relevant, or significant.