在块状熔融石英中用飞秒激光纳米加工高宽比通道（Adv. Mater. Technol.）

IF 6.4 3区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Advanced Materials Technologies Pub Date : 2024-09-17 DOI:10.1002/admt.202470085

Pasquale Barbato, Roberto Osellame, Rebeca Martínez Vázquez

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引用次数: 0

摘要

飞秒激光纳米加工

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Femtosecond Laser Nanomachining of High-Aspect-Ratio Channels in Bulk Fused Silica (Adv. Mater. Technol. 18/2024)

查看原文本刊更多论文

Femtosecond Laser Nanomachining of High-Aspect-Ratio Channels in Bulk Fused Silica (Adv. Mater. Technol. 18/2024)

Femtosecond Laser Nanomachining

In article number 2400240, Rebeca Martínez Vázquez, Pasquale Barbato, and Roberto Osellame present a novel fabrication regimen that is exploited to break the micrometer resolution limit of femtosecond laser micromachining in glass, by demonstrating long-empty channels with nanometric diameter. The irradiation and etching conditions give rise to unprecedented light-matter interaction outcomes that are explored thoroughly in this work. This process will pave the way for a remarkable advance in integrated nanophotonics and nanofluidics.

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来源期刊

Advanced Materials Technologies Materials Science-General Materials Science

CiteScore

10.20

自引率

4.40%

发文量

566

期刊介绍： Advanced Materials Technologies Advanced Materials Technologies is the new home for all technology-related materials applications research, with particular focus on advanced device design, fabrication and integration, as well as new technologies based on novel materials. It bridges the gap between fundamental laboratory research and industry.