基于四极杆质谱仪质量鉴别校正的 CxHy 放气速率测量研究

IF 1 4区 工程技术 Q4 INSTRUMENTS & INSTRUMENTATION
MAPAN Pub Date : 2024-09-11 DOI:10.1007/s12647-024-00770-1
X. Wang, Y. Cheng, M. Dong, L. Zhao, L. Chen, T. Feng, W. Guo
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引用次数: 0

摘要

材料释放的碳氢化合物(CxHy)对精密仪器的性能和寿命有重大影响。四极杆质谱仪(QMS)是最成熟、应用最广泛的部分除气速率测量仪器之一。然而,QMS 的一个潜在问题是高质辨别效应,即 m/z 值较低的离子比 m/z 值较高的离子传输效率更高。这也导致 QMS 在测量高 m/z 值的 CxHy 时灵敏度降低。针对这一问题,本文提出了一种利用十二烷来修正 QMS 的高质辨别效应的方法。为确保十二烷气体的稳定注入并将压力保持在 QMS 的工作条件内,设计了十二烷气体专用采样装置。此外,为了验证所提方法的有效性,对两台型号为 QMG250 M2 的四极杆质谱仪的高质辨别效应进行了校正,并采用连续膨胀法测定了聚四氟乙烯(PTFE)的 CxHy 发气量。结果表明,本文提出的方法可有效降低高质辨别效应对测量高 m/z 值 CxHy 的影响,同时显著提高聚四氟乙烯的 CxHy 脱气率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Study on Measurement of CxHy Outgassing Rate Based on the Correction for Quadrupole Mass Spectrometer Mass Discrimination

Study on Measurement of CxHy Outgassing Rate Based on the Correction for Quadrupole Mass Spectrometer Mass Discrimination

Study on Measurement of CxHy Outgassing Rate Based on the Correction for Quadrupole Mass Spectrometer Mass Discrimination

The hydrocarbon species (CxHy) released by the material have a significant impact on the performance and life of precision instruments. The quadrupole mass spectrometer (QMS) is one of the most established and widely used partial outgassing rate measurement instruments. However, a potential issue with QMS is the high-mass discrimination effect, wherein ions with lower m/z values are transmitted more efficiently than those with higher m/z values. It also leads to a reduction in the sensitivity of QMS when measuring CxHy with higher m/z values. To address this problem, this paper proposes a method using dodecane to correct the high-mass discrimination effect of QMS. To ensure stable injection of dodecane gas and maintain the pressure within the working conditions of QMS, a dedicated sampling device for dodecane gas is designed. Furthermore, to verify the effectiveness of the proposed method, the high-mass discrimination effect of two quadrupole mass spectrometers of the model QMG250 M2 was corrected, and the CxHy outgassing rate of polytetrafluoroethylene (PTFE) was measured by continuous expansion method. The results demonstrate that the method proposed in this paper can effectively reduce the impact of the high-mass discrimination effect on the measurement of CxHy with higher m/z values, while significantly increasing the outgassing rate of CxHy from PTFE.

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来源期刊
MAPAN
MAPAN 工程技术-物理:应用
CiteScore
2.30
自引率
20.00%
发文量
91
审稿时长
3 months
期刊介绍: MAPAN-Journal Metrology Society of India is a quarterly publication. It is exclusively devoted to Metrology (Scientific, Industrial or Legal). It has been fulfilling an important need of Metrologists and particularly of quality practitioners by publishing exclusive articles on scientific, industrial and legal metrology. The journal publishes research communication or technical articles of current interest in measurement science; original work, tutorial or survey papers in any metrology related area; reviews and analytical studies in metrology; case studies on reliability, uncertainty in measurements; and reports and results of intercomparison and proficiency testing.
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