气体加热在电容耦合射频等离子体辅助合成碳纳米材料中的重要性

IF 3.1 3区 物理与天体物理 Q2 PHYSICS, APPLIED
Tanvi Nikhar, Sankhadeep Basu, Shota Abe, Shurik Yatom, Yevgeny Raitses, Rebecca Anthony, Sergey V Baryshev
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引用次数: 0

摘要

为了研究金刚石纳米粒子,使用甲烷-氩气混合物运行了一个电容耦合射频直流等离子体反应器。从显微镜和光谱学角度获得的最终产品特征表明,该产品是一种无定形的石墨。无论反应器的宏观设置如何,这一结果都是一致的。为了解释所观察到的合成产物,我们使用激光诱导荧光和光发射光谱对 C2 和气体特性进行了测量。令人震惊的是,测量结果表明,从反应器中心到反应器壁,每毫米有 100 K 的强烈气体温度梯度。根据额外的等离子体成像,随后建立了热收缩区(丝状区)模型。结果表明,虽然存在热收缩区,但大部分气体的温度不足以促进金刚石 sp3 的形成:与 sp2 相比,sp3 的反应速率要低得多,其形成动力学预计会变得指数级缓慢。在相同条件下进行的实验进一步证实了这一结果,但在 H2/CH4 混合物中没有检测到任何输出材料:如果石墨 sp2 的形成预计是甲烷原料的主要输出材料,那么原子氢预计会在原位将其蚀刻掉,因此这种 sp2 杂化固体材料的净产量几乎为零。最后,通过用微波源代替射频,用 H2/CH4 混合气体轻松生成 sp3,从而证实了气体加热的重要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Importance of gas heating in capacitively coupled radiofrequency plasma-assisted synthesis of carbon nanomaterials
In pursuit of diamond nanoparticles, a capacitively-coupled radio frequency flow-through plasma reactor was operated with methane-argon gas mixtures. Signatures of the final product obtained microscopically and spectroscopically indicated that the product was an amorphous form of graphite. This result was consistent irrespective of combinations of the macroscopic reactor settings. To explain the observed synthesis output, measurements of C2 and gas properties were carried out by laser-induced fluorescence and optical emission spectroscopy. Strikingly, the results indicated a strong gas temperature gradient of 100 K per mm from the center of the reactor to the wall. Based on additional plasma imaging, a model of hot constricted region (filamentation region) was then formulated. It illustrated that, while the hot constricted region was present, the bulk of the gas was not hot enough to facilitate diamond sp3 formation: characterized by much lower reaction rates, when compared to sp2, sp3 formation kinetics are expected to become exponentially slow. This result was further confirmed by experiments under identical conditions but with a H2/CH4 mixture, where no output material was detected: if graphitic sp2 formation was expected as the main output material from the methane feedstock, atomic hydrogen would then be expected to etch it away in situ, such that the net production of that sp2-hybridized solid material is nearly a zero. Finally, the crucial importance of gas heating was corroborated by replacing RF with microwave source whereby facile sp3 production was attained with H2/CH4 gas mixture.
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来源期刊
Journal of Physics D: Applied Physics
Journal of Physics D: Applied Physics 物理-物理:应用
CiteScore
6.80
自引率
8.80%
发文量
835
审稿时长
2.1 months
期刊介绍: This journal is concerned with all aspects of applied physics research, from biophysics, magnetism, plasmas and semiconductors to the structure and properties of matter.
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